Development of a high-k gate stack for atomic-precision advanced manufacturing.

Conference · 01 February 2020

OSTI ID:1768736

Lu, Tzu-Ming; Anderson, Evan Michael; Campbell, DeAnna Marie; Marshall, Michael Thomas; Lu, Ping; Schmucker, Scott William; Tracy, Lisa A; Robison, Mitchell; Arghavani, Reza; Maurer, Leon; Baczewski, Andrew David; Ward, Daniel; Misra, Shashank

Abstract not provided.

• Research Organization: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1768736
• Report Number(s): SAND2020-2567C; 684384
• Country of Publication: United States
• Language: English