Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Coating Thickness Controls Crystallinity and Enables Homoepitaxial Growth of Ultra-Thin-Channel Blade-Coated In 2 O 3 Transistors

Journal Article · · Advanced Electronic Materials
; ; ; ;

Research Organization:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Organization:
~OTHER
DOE Contract Number:
SC0012704
OSTI ID:
1760483
Report Number(s):
BNL-220831-2021-JACI
Journal Information:
Advanced Electronic Materials, Vol. 6, Issue 11
Publisher:
Wiley
Country of Publication:
United States
Language:
English

References (60)

Electrical transport, electrothermal transport, and effective electron mass in single-crystalline In 2 O 3 films August 2013
Electrical Properties of Single Crystals of Indium Oxide September 1962
Low-temperature, high-performance solution-processed metal oxide thin-film transistors formed by a ‘sol–gel on chip’ process December 2010
Heterojunction oxide thin-film transistors with unprecedented electron mobility grown from solution March 2017
Low-temperature fabrication of high-performance metal oxide thin-film electronics via combustion processing April 2011
Flexible metal-oxide devices made by room-temperature photochemical activation of sol–gel films September 2012
Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors November 2004
Metal oxides for optoelectronic applications March 2016
Combustion Synthesized Zinc Oxide Electron‐Transport Layers for Efficient and Stable Perovskite Solar Cells February 2019
Inkjet printed high-mobility indium zinc tin oxide thin film transistors January 2009
Inkjet-Printed In 2 O 3 Thin-Film Transistor below 200 °C November 2013
Flexography-Printed In 2 O 3 Semiconductor Layers for High-Mobility Thin-Film Transistors on Flexible Plastic Substrate October 2015
All Inkjet-Printed Metal-Oxide Thin-Film Transistor Array with Good Stability and Uniformity Using Surface-Energy Patterns February 2017
Scalability and homogeneity of slot die-coated metal oxide semiconductor for TFTs: Scalability and homogeneity of coated metal oxide May 2016
Expeditious, scalable solution growth of metal oxide films by combustion blade coating for flexible electronics April 2019
Ultra-Flexible, “Invisible” Thin-Film Transistors Enabled by Amorphous Metal Oxide/Polymer Channel Layer Blends February 2015
Solution-Processed All-Oxide Transparent High-Performance Transistors Fabricated by Spray-Combustion Synthesis January 2016
Exploring the Leidenfrost Effect for the Deposition of High-Quality In 2 O 3 Layers via Spray Pyrolysis at Low Temperatures and Their Application in High Electron Mobility Transistors April 2017
Spray-combustion synthesis: Efficient solution route to high-performance oxide transistors March 2015
Role of the electronically-active amorphous state in low-temperature processed In 2 O 3 thin-film transistors January 2020
Densification process and mechanism of solution-processed amorphous indium zinc oxide thin films for high-performance thin film transistors June 2019
Metal Oxide Transistors via Polyethylenimine Doping of the Channel Layer: Interplay of Doping, Microstructure, and Charge Transport June 2016
Synergistic Boron Doping of Semiconductor and Dielectric Layers for High-Performance Metal Oxide Transistors: Interplay of Experiment and Theory September 2018
Electronic Structure of Low-Temperature Solution-Processed Amorphous Metal Oxide Semiconductors for Thin-Film Transistor Applications February 2015
Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers May 2006
Ultra-flexible solution-processed organic field-effect transistors January 2012
Inorganic Materials and Assembly Techniques for Flexible and Stretchable Electronics April 2015
Fabrication of High-Performance Ultrathin In 2 O 3 Film Field-Effect Transistors and Biosensors Using Chemical Lift-Off Lithography February 2015
Aptamer–field-effect transistors overcome Debye length limitations for small-molecule sensing September 2018
Metal oxide semiconductor nanomembrane–based soft unnoticeable multifunctional electronics for wearable human-machine interfaces August 2019
Generating thickness gradients of thin polymer films via flow coating February 2006
Morphology changes upon scaling a high-efficiency, solution-processed solar cell January 2016
Critical assessment of charge mobility extraction in FETs December 2017
The impact of post-deposition annealing on the performance of solution-processed single layer In 2 O 3 and isotype In 2 O 3 /ZnO heterojunction transistors January 2017
High-mobility nanometer-thick crystalline In–Sm–O thin-film transistors via aqueous solution processing January 2020
High mobility ultra-thin crystalline indium oxide thin film transistor using atomic layer deposition September 2018
Stable, Solution-Processed, High-Mobility ZnO Thin-Film Transistors March 2007
Sol–gel-deposited ZnO thin films: A review October 2010
Sol-Gel Preparation of Transparent and Conductive Aluminum-Doped Zinc Oxide Films with Highly Preferential Crystal Orientation June 1998
Crystallization behavior and origin of c-axis orientation in sol–gel-derived ZnO:Li thin films on glass substrates August 2001
Amorphous IGZO Thin-Film Transistors With Ultrathin Channel Layers November 2015
Performance regeneration of InGaZnO transistors with ultra-thin channels March 2015
Boosting Carrier Mobility in Zinc Oxynitride Thin-Film Transistors via Tantalum Oxide Encapsulation June 2019
A Multifunctional Interlayer for Solution Processed High Performance Indium Oxide Transistors July 2018
High mobility tri-layer a-Si:H thin-film transistors with ultrathin active layer August 1997
Stability and spacial trap state distribution of solution processed ZnO-thin film transistors April 2013
Operation Characteristics of Thin-Film Transistors Using Very Thin Amorphous In–Ga–Zn–O Channels January 2011
Influence of the semiconductor thickness on the electrical properties of transparent TFTs based on indium zinc oxide June 2006
Low Temperature Solution-Processed InZnO Thin-Film Transistors January 2010
Impact of Layer Configuration and Doping on Electron Transport and Bias Stability in Heterojunction and Superlattice Metal Oxide Transistors July 2019
Modulation-Doped In 2 O 3 /ZnO Heterojunction Transistors Processed from Solution March 2017
Trap-limited and percolation conduction mechanisms in amorphous oxide semiconductor thin film transistors May 2011
Surface Characterization and Modification of Indium Tin Oxide in Ultrahigh Vacuum March 2000
Indium Oxide Thin-Film Transistors Processed at Low Temperature via Ultrasonic Spray Pyrolysis December 2014
Growth mechanism and electronic properties of epitaxial In 2 O 3 films on sapphire November 2011
Epitaxial growth and characterization of high quality In2O3 films on a-plane sapphire substrates by MOCVD September 2019
A Review of Low‐Temperature Solution‐Processed Metal Oxide Thin‐Film Transistors for Flexible Electronics September 2019
Recent Advances of Solution-Processed Metal Oxide Thin-Film Transistors March 2018
All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process December 2019
Printable Ultrathin Metal Oxide Semiconductor-Based Conformal Biosensors October 2015

Similar Records

Related Subjects

99 GENERAL AND MISCELLANEOUS