Influence of precursor chemistry on the microstructure and crystallization of barium titanate thin films
- Univ. of California, Irvine, CA (United States)
- Hughes Research Labs., Malibu, CA (United States)
Since sol-gel derived barium titanate thin films often suffer from residual porosity, chemical modifications of barium titanium alkoxide sols were studied in order to determine if densification could be promoted prior to crystallization. Sol-gel derived barium titanate thin films were prepared on Si substrates using methoxypropoxide Ba-Ti double alkoxide sols or ethoxide based sols with acac and DEA additives. Decomposition and crystallization behavior were characterized using TGA/DTA and XRD, while the microstructure of the films was studied using analytical TEM. Heat treatments at 750{degrees}C by conventional furnace annealing yielded polycrystalline and randomly oriented BaTiO{sub 3}. All films were fine-grained and nanoporous, with grains and pores on the order of 25-50 nm. The uniform grain size in these materials suggests a similar controlling nucleation step for all these sol-gel derived materials, hypothesized to be the early fine scale precipitation of TiO{sub 2}. Residual organics in the various sols did not decompose until fairly high temperatures (620-650{degrees}C), possibly contributing to the residual porosity observed.
- DOE Contract Number:
- AC05-76OR00033
- OSTI ID:
- 175510
- Report Number(s):
- CONF-9410372--
- Country of Publication:
- United States
- Language:
- English
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