In-situ transmission electron microscopy crystallization studies of sol-gel-derived barium titanate thin films
- Univ. of California, Irvine, CA (United States). Dept. of Chemical and Biochemical Engineering
- Oak Ridge Inst. for Science and Education, TN (United States)
- Hughes Research Lab., Malibu, CA (United States)
Barium titanate (BaTiO{sub 3}) thin films that were derived from methoxypropoxide precursors were deposited onto (100) Si, Pt/Ti/SiO{sub 2}/(100) Si, and molecular-beam-epitaxy-grown (MBE-grown) (100) BaTiO{sub 3} on (100) Si substrates by spin coating. The crystallization behavior of the amorphous-gel films was characterized using in-situ transmission electron microscopy heating experiments, glancing-angle X-ray diffraction, and differential thermal analysis/thermogravimetric analysis. Amorphous-gel films crystallized at a temperature of {approximately}600 C to an intermediate nanoscale (5--10 nm) barium titanium carbonate phase, presumably BaTiO{sub 2}CO{sub 3}, that subsequently transformed to nanocrystalline (20--50 nm) BaTiO{sub 3}. Random nucleation in the bulk of the gel film was observed on all substrates. In addition, oriented growth of BaTiO{sub 3} was concurrently observed on MBE-grown BaTiO{sub 3} on (100) Si. High-temperature decomposition of the intermediate carbonate phase contributed to nanometer-scale residual porosity in the films. High concentrations of water of hydrolysis inhibited the formation of the intermediate carbonate phase; however, these sols precipitated and were not suitable for spin coating.
- Sponsoring Organization:
- California State Government, Sacramento, CA (United States); USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC05-96OR22464; AC05-76OR00033
- OSTI ID:
- 556435
- Journal Information:
- Journal of the American Ceramic Society, Journal Name: Journal of the American Ceramic Society Journal Issue: 11 Vol. 80; ISSN 0002-7820; ISSN JACTAW
- Country of Publication:
- United States
- Language:
- English
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