5-Level MEMS Technology with Integrated n-MOS Electronics.
Conference
·
OSTI ID:1713128
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1713128
- Report Number(s):
- SAND2008-1872P; 520072
- Country of Publication:
- United States
- Language:
- English
Similar Records
5-Level MEMS Technology with Integrated n-MOS Electronics.
MEMS Technologies.
A New Wafer-Level Packaging Technology for MEMS with Hermetic Micro-Environment.
Conference
·
Mon Dec 31 23:00:00 EST 2007
·
OSTI ID:1146291
MEMS Technologies.
Conference
·
Tue Jul 01 00:00:00 EDT 2008
·
OSTI ID:1143122
A New Wafer-Level Packaging Technology for MEMS with Hermetic Micro-Environment.
Conference
·
Mon Jan 31 23:00:00 EST 2011
·
OSTI ID:1120857