In situ metrology for adaptive x-ray optics with an absolute distance measuring sensor array

Badami, V. G.; Abruña, E.; Huang, Lei; Idir, M.

doi:10.1063/1.5060954

In situ metrology for adaptive x-ray optics with an absolute distance measuring sensor array

Journal Article · Tue Feb 12 23:00:00 EST 2019 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.5060954· OSTI ID:1706602

Badami, V. G. ^[1]; Abruña, E. ^[1]; ^[2]; Idir, M. ^[2]

Zygo Corporation, Middlefield, CT (United States)
Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)

Adaptive x-ray mirrors are emerging as one of the primary solutions for meeting the performance needs of the next generation of x-ray light sources. Currently, these mirrors operate open loop with intermittent feedback from invasive sensors that measure the beam quality. This paper outlines a novel design for real-time in situ metrology of the shape of these mirrors using an array of interferometric sensors that does not interrupt the x-ray beam. We describe a proof-of-principle demonstration which shows sub-nm agreement over a range of mirror deflection magnitudes and shapes as compared to simultaneous measurements by using a large-aperture Fizeau interferometer.

View Accepted Manuscript (DOE)

Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0012704

OSTI ID:: 1706602

Report Number(s):: BNL--220575-2020-JAAM

Journal Information:: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 2 Vol. 90; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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The 6th International Workshop on X-ray Optics and Metrology—IWXM 2018 Huang, Yu-Shan; Assoufid, Lahsen Review of Scientific Instruments, Vol. 90, Issue 2 https://doi.org/10.1063/1.5092158	journal	February 2019

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