Thomson scattering experiments on a 100 MHz inductively coupled plasma calibrated by Raman scattering

Journal Article · Mon May 01 00:00:00 EDT 1995 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1146444· OSTI ID:165201

de Regt, J M; Engeln, R A.H.; de Groote, F P.J.; van der Mullen, J A.M.; Schram, D C ^[1]

---

1. Department of Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven (Netherlands)

A new calibration method to obtain the electron density from Thomson scattering on an inductively coupled plasma is discussed. Raman scattering of nitrogen is used for recovering the Rayleigh scattering signal. This has the advantage that no corrections are necessary for stray light, like with other calibration methods, using the direct measured Rayleigh scattering signal on a well-known gas. It is shown that electron densities and electron temperatures can be measured with an accuracy of about 15% in density and of about 150 K in temperature. {copyright} {ital 1995} {ital American} {ital Institute} {ital of} {ital Physics}.

• OSTI ID: 165201
• Journal Information: Review of Scientific Instruments, Vol. 66, Issue 5; Other Information: PBD: May 1995
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION
PLASMA DIAGNOSTICS
THOMSON SCATTERING
ELECTRIC DISCHARGES
RAYLEIGH SCATTERING
RAMAN SPECTRA
ELECTRON DENSITY
CALIBRATION
ELECTRON TEMPERATURE
ARGON