Low thermal budget high-k/metal surface gate for buried donor-based devices

Anderson, Evan M.; Campbell, DeAnna M.; Maurer, Leon N.; Baczewski, Andrew D.; Marshall, Michael T.; Lu, Tzu-Ming; Lu, Ping; Tracy, Lisa A.; Schmucker, Scott W.; Ward, Daniel R.; Misra, Shashank

doi:10.1088/2515-7639/ab953b

Low thermal budget high-k/metal surface gate for buried donor-based devices

Journal Article · Thu Jun 18 00:00:00 EDT 2020 · JPhys Materials

DOI:https://doi.org/10.1088/2515-7639/ab953b· OSTI ID:1633819

; Campbell, DeAnna M.; ; Baczewski, Andrew D.; Marshall, Michael T.; Lu, Tzu-Ming; Lu, Ping; Tracy, Lisa A.; Schmucker, Scott W.; Ward, Daniel R.; Misra, Shashank

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Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000; NA0003525

OSTI ID:: 1633819

Alternate ID(s):: OSTI ID: 1633820
OSTI ID: 1634811

Report Number(s):: SAND2020--5994J

Journal Information:: JPhys Materials, Journal Name: JPhys Materials Journal Issue: 3 Vol. 3; ISSN 2515-7639

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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