Mid-infrared materials and devices on a Si platform for optical sensing

Singh, Vivek; Lin, Pao Tai; Patel, Neil; Lin, Hongtao; Li, Lan; Zou, Yi; Deng, Fei; Ni, Chaoying; Hu, Juejun; Giammarco, James; Soliani, Anna Paola; Zdyrko, Bogdan; Luzinov, Igor; Novak, Spencer; Novak, Jackie; Wachtel, Peter; Danto, Sylvain; Musgraves, J. David; Richardson, Kathleen; Kimerling, Lionel C.; Agarwal, Anuradha M.

doi:10.1088/1468-6996/15/1/014603

Mid-infrared materials and devices on a Si platform for optical sensing

Journal Article · Thu Jan 30 00:00:00 EST 2014 · Science and Technology of Advanced Materials

DOI:https://doi.org/10.1088/1468-6996/15/1/014603· OSTI ID:1625218

Singh, Vivek ^[1]; Lin, Pao Tai ^[2]; Patel, Neil ^[2]; Lin, Hongtao ^[3]; Li, Lan ^[3]; Zou, Yi ^[3]; Deng, Fei ^[3]; Ni, Chaoying ^[3]; Hu, Juejun ^[3]; Giammarco, James ^[4]; Soliani, Anna Paola ^[4]; Zdyrko, Bogdan ^[4]; Luzinov, Igor ^[4]; Novak, Spencer ^[4]; Novak, Jackie ^[4]; Wachtel, Peter ^[4]; Danto, Sylvain ^[4]; Musgraves, J. David ^[4]; Richardson, Kathleen ^[5]; Kimerling, Lionel C. ^[2] more »

Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States). Microphotonics Center; DOE/OSTI
Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States). Microphotonics Center
Univ. of Delaware, Newark, DE (United States). Dept. of Materials Science and Engineering
Clemson Univ., SC (United States). Dept. of Materials Science and Engineering
Clemson Univ., SC (United States). Dept. of Materials Science and Engineering; Univ. of Central Florida, Orlando, FL (United States)

In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiNx waveguides are useful in differential sensing applications. Photonic crystal cavities and microdisk resonators based on chalcogenide glasses for high sensitivity are also demonstrated as effective mid-IR sensors. Polymer-based functionalization layers, to enhance the sensitivity and selectivity of our sensor devices, are also presented. We discuss the design of mid-IR chalcogenide waveguides integrated with polycrystalline PbTe detectors on a monolithic silicon platform for optical sensing, wherein the use of a low-index spacer layer enables the evanescent coupling of mid-IR light from the waveguides to the detector. Finally, we show the successful fabrication processing of our first prototype mid-IR waveguide-integrated detectors.

View Accepted Manuscript (DOE)

Research Organization:: Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States); Oklahoma National Guard, Oklahoma City, OK (United States)

Sponsoring Organization:: Defense Threat Reduction Agency (DTRA); National Science Foundation (NSF); USDOE National Nuclear Security Administration (NNSA); USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division

Grant/Contract Number:: NA0002421

OSTI ID:: 1625218

Alternate ID(s):: OSTI ID: 22476768

Journal Information:: Science and Technology of Advanced Materials, Journal Name: Science and Technology of Advanced Materials Journal Issue: 1 Vol. 15; ISSN 1468-6996

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United States

Language:: English

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Towards on-chip mid infrared photonic aerosol spectroscopy Singh, Robin; Su, Peter; Kimerling, Lionel Applied Physics Letters, Vol. 113, Issue 23 https://doi.org/10.1063/1.5058694	journal	December 2018
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