Monolithic on-chip mid-IR methane gas sensor with waveguide-integrated detector

Su, P.; Han, Z.; Kita, D.; Becla, P.; Lin, H.; Deckoff-Jones, S.; Richardson, K.; Kimerling, L. C.; Hu, J.; Agarwal, A.

doi:10.1063/1.5053599

Monolithic on-chip mid-IR methane gas sensor with waveguide-integrated detector

Journal Article · Wed Feb 06 23:00:00 EST 2019 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.5053599· OSTI ID:1614526

^[1]; Han, Z. ^[2]; ^[2]; Becla, P. ^[3]; ^[2]; Deckoff-Jones, S. ^[2]; Richardson, K. ^[4]; Kimerling, L. C. ^[2]; Hu, J. ^[2]; ^[2]

Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States); DOE/OSTI
Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
CapeSym, Natick, MA (United States)
Univ. of Central Florida, Orlando, FL (United States)

Herein we demonstrate a monolithic waveguide sensor integrated with a detector on-chip for mid-infrared absorption spectroscopic sensing. The optical sensing element comprises a chalcogenide glass spiral waveguide, and the detector is a PbTe photoconductor integrated directly with the chalcogenide waveguide. The limit of detection of the sensor for methane gas was experimentally assessed to be 1% by volume. Further optimization of the fabrication process and normalization of the laser power fluctuations should result in a maximum sensitivity of 330 ppmv.

View Accepted Manuscript (DOE)

Research Organization:: Univ. of Delaware, Newark, DE (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA), Office of Defense Nuclear Nonproliferation (NA-20); National Science Foundation (NSF)

Grant/Contract Number:: NA0002509

OSTI ID:: 1614526

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 5 Vol. 114; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

References (36)

Label-Free Glucose Sensing Using Chip-Scale Mid-Infrared Integrated Photonics Lin, Pao Tai; Lin, Hao-Yu Greg; Han, Zhaohong Advanced Optical Materials, Vol. 4, Issue 11 https://doi.org/10.1002/adom.201600440	journal	August 2016
Evanescent wave optical micro-sensor based on chalcogenide glass Charrier, Joël; Brandily, Marie-Laure; Lhermite, Hervé Sensors and Actuators B: Chemical, Vol. 173 https://doi.org/10.1016/j.snb.2012.07.056	journal	October 2012
Evanescently coupled mid-infrared photodetector for integrated sensing applications: Theory and design Singh, Vivek; Zens, Timothy; Hu, Juejun Sensors and Actuators B: Chemical, Vol. 185 https://doi.org/10.1016/j.snb.2013.04.065	journal	August 2013
Mid-infrared holey and slotted photonic crystal waveguides in silicon-on-sapphire for chemical warfare simulant detection Zou, Yi; Chakravarty, Swapnajit; Wray, Parker Sensors and Actuators B: Chemical, Vol. 221 https://doi.org/10.1016/j.snb.2015.07.061	journal	December 2015
Mid-Infrared Spectroscopy Platform Based on GaAs/AlGaAs Thin-Film Waveguides and Quantum Cascade Lasers Sieger, Markus; Haas, Julian; Jetter, Michael Analytical Chemistry, Vol. 88, Issue 5 https://doi.org/10.1021/acs.analchem.5b04144	journal	February 2016
Heterogeneously Integrated Silicon Photonics for the Mid-Infrared and Spectroscopic Sensing Chen, Yu; Lin, Hongtao; Hu, Juejun ACS Nano, Vol. 8, Issue 7 https://doi.org/10.1021/nn501765k	journal	June 2014
Mid-infrared frequency combs Schliesser, Albert; Picqué, Nathalie; Hänsch, Theodor W. Nature Photonics, Vol. 6, Issue 7 https://doi.org/10.1038/nphoton.2012.142	journal	June 2012
Ultra-thin high-efficiency mid-infrared transmissive Huygens meta-optics Zhang, Li; Ding, Jun; Zheng, Hanyu Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-018-03831-7	journal	April 2018
Chalcogenide glass-on-graphene photonics Lin, Hongtao; Song, Yi; Huang, Yizhong Nature Photonics, Vol. 11, Issue 12 https://doi.org/10.1038/s41566-017-0033-z	journal	October 2017
Structural, electrical, and optical properties of thermally evaporated nanocrystalline PbTe films Wang, Jianfei; Hu, Juejun; Sun, Xiaochen Journal of Applied Physics, Vol. 104, Issue 5 https://doi.org/10.1063/1.2970163	journal	September 2008
On-chip mid-infrared gas detection using chalcogenide glass waveguide Han, Z.; Lin, P.; Singh, V. Applied Physics Letters, Vol. 108, Issue 14 https://doi.org/10.1063/1.4945667	journal	April 2016
On-chip chalcogenide glass waveguide-integrated mid-infrared PbTe detectors Han, Z.; Singh, V.; Kita, D. Applied Physics Letters, Vol. 109, Issue 7 https://doi.org/10.1063/1.4961532	journal	August 2016
Development of an evanescent optical integrated sensor in the mid-infrared for detection of pollution in groundwater or seawater Baudet, E.; Gutierrez-Arroyo, A.; Baillieul, M. Advanced Device Materials, Vol. 3, Issue 2 https://doi.org/10.1080/20550308.2017.1338211	journal	June 2017
Spiral Waveguides on Germanium-on-Silicon Nitride Platform for Mid-IR Sensing Applications Li, Wei; Tan, Chuan Seng; Anantha, P. IEEE Photonics Journal, Vol. 10, Issue 3 https://doi.org/10.1109/JPHOT.2018.2829988	journal	June 2018
Heterogeneous Integration of GaInAsSb p-i-n Photodiodes on a Silicon-on-Insulator Waveguide Circuit Hattasan, Nannicha; Gassenq, Alban; Cerutti, Laurent IEEE Photonics Technology Letters, Vol. 23, Issue 23 https://doi.org/10.1109/LPT.2011.2169244	journal	December 2011
Progress on the Fabrication of On-Chip, Integrated Chalcogenide Glass (Chg)-Based Sensors Richardson, K.; Petit, L.; Carlie, N. Journal of Nonlinear Optical Physics & Materials, Vol. 19, Issue 01 https://doi.org/10.1142/S0218863510005042	journal	March 2010
On-chip spectrophotometry for bioanalysis using microring resonators Nitkowski, Arthur; Baeumner, Antje; Lipson, Michal Biomedical Optics Express, Vol. 2, Issue 2 https://doi.org/10.1364/BOE.2.000271	journal	January 2011
Glucose sensing by waveguide-based absorption spectroscopy on a silicon chip Ryckeboer, E.; Bockstaele, R.; Vanslembrouck, M. Biomedical Optics Express, Vol. 5, Issue 5 https://doi.org/10.1364/BOE.5.001636	journal	January 2014
Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor Hu, Juejun; Tarasov, Vladimir; Agarwal, Anu Optics Express, Vol. 15, Issue 5 https://doi.org/10.1364/OE.15.002307	journal	January 2007
High performance, waveguide integrated Ge photodetectors Ahn, Donghwan; Hong, Ching-yin; Liu, Jifeng Optics Express, Vol. 15, Issue 7 https://doi.org/10.1364/OE.15.003916	journal	January 2007
Cavity-enhanced on-chip absorption spectroscopy using microring resonators Nitkowski, Arthur; Chen, Long; Lipson, Michal Optics Express, Vol. 16, Issue 16 https://doi.org/10.1364/OE.16.011930	journal	January 2008
Optical loss reduction in high-index-contrast chalcogenide glass waveguides via thermal reflow Hu, Juejun; Feng, Ning-Ning; Carlie, Nathan Optics Express, Vol. 18, Issue 2 https://doi.org/10.1364/OE.18.001469	journal	January 2010
Study of evanescently-coupled and grating-assisted GaInAsSb photodiodes integrated on a silicon photonic chip Gassenq, Alban; Hattasan, Nannicha; Cerutti, Laurent Optics Express, Vol. 20, Issue 11 https://doi.org/10.1364/OE.20.011665	journal	January 2012
Low-loss chalcogenide waveguides for chemical sensing in the mid-infrared Ma, Pan; Choi, Duk-Yong; Yu, Yi Optics Express, Vol. 21, Issue 24 https://doi.org/10.1364/OE.21.029927	journal	January 2013
Sensing nitrous oxide with QCL-coupled silicon-on-sapphire ring resonators Smith, Clinton J.; Shankar, Raji; Laderer, Matthew Optics Express, Vol. 23, Issue 5 https://doi.org/10.1364/OE.23.005491	journal	January 2015
III-V-on-silicon integrated micro - spectrometer for the 3 μm wavelength range Muneeb, M.; Vasiliev, A.; Ruocco, A. Optics Express, Vol. 24, Issue 9 https://doi.org/10.1364/OE.24.009465	journal	January 2016
On-chip methane sensing by near-IR absorption signatures in a photonic crystal slot waveguide Lai, Wei-Cheng; Chakravarty, Swapnajit; Wang, Xiaolong Optics Letters, Vol. 36, Issue 6 https://doi.org/10.1364/OL.36.000984	journal	January 2011
Low-loss photonic device in Ge–Sb–S chalcogenide glass Du, Qingyang; Huang, Yizhong; Li, Junying Optics Letters, Vol. 41, Issue 13 https://doi.org/10.1364/OL.41.003090	journal	January 2016
Chalcogenide glass waveguides with paper-based fluidics for mid-infrared absorption spectroscopy Mittal, Vinita; Nedeljkovic, Milos; Rowe, David J. Optics Letters, Vol. 43, Issue 12 https://doi.org/10.1364/OL.43.002913	journal	January 2018
Mid-infrared sensing between 52 and 66 µm wavelengths using Ge-rich SiGe waveguides [Invited] Liu, Qiankun; Ramirez, Joan Manel; Vakarin, Vladyslav Optical Materials Express, Vol. 8, Issue 5 https://doi.org/10.1364/OME.8.001305	journal	January 2018
Methane absorption spectroscopy on a silicon photonic chip Tombez, L.; Zhang, E. J.; Orcutt, J. S. Optica, Vol. 4, Issue 11 https://doi.org/10.1364/OPTICA.4.001322	journal	January 2017
Chip-scale broadband spectroscopic chemical sensing using an integrated supercontinuum source in a chalcogenide glass waveguide Du, Qingyang; Luo, Zhengqian; Zhong, Huikai Photonics Research, Vol. 6, Issue 6 https://doi.org/10.1364/PRJ.6.000506	journal	January 2018
Progress on the Fabrication of On-Chip, Integrated Chalcogenide Glass (ChG)-based Sensors Petit, Laeticia; Carlie, Nathan; Zdyrko, Bodgan Advances in Optical Materials, Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest https://doi.org/10.1364/aiom.2009.awb2	conference	January 2009
Ultra-thin, High-efficiency Mid-Infrared Transmissive Huygens Meta-Optics Zheng, Hanyu; Ding, Jun; Zhang, Li Frontiers in Optics 2017 https://doi.org/10.1364/fio.2017.fth4a.2	conference	January 2017
Mid-infrared integrated photonics on silicon: a perspective Lin, Hongtao; Luo, Zhengqian; Gu, Tian Nanophotonics, Vol. 7, Issue 2 https://doi.org/10.1515/nanoph-2017-0085	journal	December 2017
Chalcogenide Glass Optical Waveguides for Infrared Biosensing Anne, Marie-Laure; Keirsse, Julie; Nazabal, Virginie Sensors, Vol. 9, Issue 9 https://doi.org/10.3390/s90907398	journal	September 2009

Cited By (7)

Towards Integrated Mid-Infrared Gas Sensors Popa, Daniel; Udrea, Florin Sensors, Vol. 19, Issue 9 https://doi.org/10.3390/s19092076	journal	May 2019
Leveraging of MEMS Technologies for Optical Metamaterials Applications Ren, Zhihao; Chang, Yuhua; Ma, Yiming Advanced Optical Materials https://doi.org/10.1002/adom.201900653	journal	July 2019
Mixing Properties of Room Temperature Patch‐Antenna Receivers in a Mid‐Infrared (λ ≈ 9 µm) Heterodyne System Bigioli, Azzurra; Gacemi, Djamal; Palaferri, Daniele Laser & Photonics Reviews, Vol. 14, Issue 2 https://doi.org/10.1002/lpor.201900207	journal	December 2019
Nanoporous network SnO2 constructed with ultra-small nanoparticles for methane gas sensor Hong, Ping; Li, Yuxiu; Zhang, Xu Journal of Materials Science: Materials in Electronics, Vol. 30, Issue 15 https://doi.org/10.1007/s10854-019-01802-2	journal	July 2019
Opportunities for photonic integrated circuits in optical gas sensors Hänsel, Andreas; Heck, Martijn J. R. Journal of Physics: Photonics, Vol. 2, Issue 1 https://doi.org/10.1088/2515-7647/ab6742	journal	January 2020
Reverse-strip-structure Ge ₂₈ Sb ₁₂ Se ₆₀ chalcogenide glass waveguides prepared by micro-trench filling and lift-off Li, Chengdong; Guo, Panpan; Huang, Wei Journal of the Optical Society of America B, Vol. 37, Issue 1 https://doi.org/10.1364/josab.37.000082	journal	December 2019
Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform Dong, Bowei; Luo, Xianshu; Zhu, Shiyang Optics Express, Vol. 27, Issue 14 https://doi.org/10.1364/oe.27.019815	journal	January 2019

Similar Records

On-chip chalcogenide glass waveguide-integrated mid-infrared PbTe detectors

Journal Article · Thu Aug 18 00:00:00 EDT 2016 · Applied Physics Letters · OSTI ID:1467877

Mid-infrared materials and devices on a Si platform for optical sensing

Journal Article · Wed Jan 29 23:00:00 EST 2014 · Science and Technology of Advanced Materials · OSTI ID:1625218

Indium phosphide-based monolithically integrated PIN waveguide photodiode readout for resonant cantilever sensors

Journal Article · Mon Oct 06 00:00:00 EDT 2014 · Applied Physics Letters · OSTI ID:22350860

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
Chalcogenides
Detection limit
Infrared spectroscopy
Nanofabrication
Organic compounds
Photoconductive materials
Photonics
Physics
Semiconductors
Sensors
Signal processing

Monolithic on-chip mid-IR methane gas sensor with waveguide-integrated detector

Citation Formats

References (36)

Cited By (7)

Similar Records

Related Subjects