Low-voltage field emitter array cathode for high frequency applications

Journal Article · Thu Jul 01 04:00:00 EDT 1993 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena

DOI:https://doi.org/10.1116/1.586932· OSTI ID:161695

Hill, D N; Ohlinger, W L; Feeney, R K ^[1]

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1. Georgia Institute of Technology, Atlanta, GA (United States); and others

The composite-based low voltage field emitter cathode offers distinct advantages for high-frequency applications. It is based on a directionally solidified ZrO{sub 2}{center_dot}Y{sub 2}O{sub 3}-W eutectic composite containing aligned, single-crystal tungsten fibers, {approx}500 nm in diameter, with spatial densities of 2-50 X 10{sup 6}/cm{sup 2}. The composite can be etched to form fibers of virtually any length with tip radii of 5-10 nm. A gridded structure can be formed around the fibers using a line-of-sight vapor deposition process. Because of the thickness of the composite chips used as the substrate (0.5 mm) and the high resistivity of the oxide matrix, the insulator film can be made extremely thin, thereby reducing the extractor aperture radius. Emission tests have verified this configuration results in measurably higher field enhancement values for the arrays. 11 refs., 9 figs.

• OSTI ID: 161695
• Report Number(s): CONF-930115--; CNN: Contract MDA972-91-C-0034
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena Journal Issue: 4 Vol. 11; ISSN JVTBD9; ISSN 0734-211X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
APERTURES
CAPACITANCE
CATHODES
COMPOSITE MATERIALS
ELECTRIC CONDUCTIVITY
FABRICATION
FIBERS
MICROWAVE EQUIPMENT
PERFORMANCE
TUNGSTEN
YTTRIUM OXIDES
ZIRCONIUM OXIDES