Heat capacities, entropies, and Gibbs free energies of formation of low-k amorphous Si(O)CH dielectric films and implications for stability during processing
Journal Article
·
· Journal of Chemical Thermodynamics
Not provided.
- Research Organization:
- Brigham Young Univ., Provo, UT (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- SC0016446
- OSTI ID:
- 1612566
- Journal Information:
- Journal of Chemical Thermodynamics, Vol. 128, Issue C; ISSN 0021-9614
- Publisher:
- Elsevier
- Country of Publication:
- United States
- Language:
- English
Similar Records
Heat capacities, entropies, and Gibbs free energies of formation of low-k amorphous Si(O)CH dielectric films and implications for stability during processing
LOW TEMPERATURE HEAT CAPACITIES OF INORGANIC SOLIDS V. THE HEAT CAPACITY OF PURE ELEMENTARY BORON IN BOTH AMORPHOUS AND CRYSTALLINE CONDITIONS BETWEEN 13 AND 305 K. SOME FREE ENERGIES OF FORMATION
Thermochemical data for merlinoite: 1. Low-temperature heat capacities, entropies, and enthalpies of formation at 298. 15 K of six synthetic samples having various Si/Al and Na/(Na + K) ratios
Journal Article
·
Tue Jan 01 00:00:00 EST 2019
· Journal of Chemical Thermodynamics
·
OSTI ID:1612566
+3 more
LOW TEMPERATURE HEAT CAPACITIES OF INORGANIC SOLIDS V. THE HEAT CAPACITY OF PURE ELEMENTARY BORON IN BOTH AMORPHOUS AND CRYSTALLINE CONDITIONS BETWEEN 13 AND 305 K. SOME FREE ENERGIES OF FORMATION
Journal Article
·
Wed Mar 01 00:00:00 EST 1961
· Journal of the American Chemical Society (U.S.)
·
OSTI ID:1612566
Thermochemical data for merlinoite: 1. Low-temperature heat capacities, entropies, and enthalpies of formation at 298. 15 K of six synthetic samples having various Si/Al and Na/(Na + K) ratios
Journal Article
·
· American Mineralogist; (USA)
·
OSTI ID:1612566