Far-field thermal imaging below diffraction limit

Ziabari, Amirkoushyar; Parsa, Maryam; Xuan, Yi; Bahk, Je-Hyeong; Yazawa, Kazuaki; Alvarez, F. Xavier; Shakouri, Ali

doi:10.1364/OE.380866

Far-field thermal imaging below diffraction limit

Journal Article · Mon Mar 02 00:00:00 EST 2020 · Optics Express

DOI:https://doi.org/10.1364/OE.380866· OSTI ID:1606852

^[1]; Parsa, Maryam ^[1]; Xuan, Yi ^[2]; Bahk, Je-Hyeong ^[3]; Yazawa, Kazuaki ^[2]; Alvarez, F. Xavier ^[4]; Shakouri, Ali ^[2]

Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Purdue Univ., West Lafayette, IN (United States)
Purdue Univ., West Lafayette, IN (United States)
Purdue Univ., West Lafayette, IN (United States); Univ. of Cincinnati, OH (United States)
Univ. Autónoma de Barcelona, Bellaterra, Catalonia (Spain)

Non-uniform self-heating and temperature hotspots are major concerns compromising the performance and reliability of submicron electronic and optoelectronic devices. At deep submicron scales where effects such as contact-related artifacts and diffraction limits accurate measurements of temperature hotspots, non-contact thermal characterization can be extremely valuable. In this work, we use a Bayesian optimization framework with generalized Gaussian Markov random field (GGMRF) prior model to obtain accurate full-field temperature distribution of self-heated metal interconnects from their thermoreflectance thermal images (TRI) with spatial resolution 2.5 times below Rayleigh limit for 530nm illumination. Finite element simulations along with TRI experimental data were used to characterize the point spread function of the optical imaging system. In addition, unlike iterative reconstruction algorithms that use ad hoc regularization parameters in their prior models to obtain the best quality image, we used numerical experiments and finite element modeling to estimate the regularization parameter for solving a real experimental inverse problem.

View Accepted Manuscript (DOE)

Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1606852

Journal Information:: Optics Express, Journal Name: Optics Express Journal Issue: 5 Vol. 28; ISSN 1094-4087; ISSN OPEXFF

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

References (39)

Probing Thermal Flux in Twinned Ge Nanowires through Raman Spectroscopy Majumdar, Dipanwita; Biswas, Subhajit; Ghoshal, Tandra ACS Applied Materials & Interfaces, Vol. 7, Issue 44 https://doi.org/10.1021/acsami.5b07025	journal	November 2015
Quantitative Thermometry of Nanoscale Hot Spots Menges, Fabian; Riel, Heike; Stemmer, Andreas Nano Letters, Vol. 12, Issue 2, p. 596-601 https://doi.org/10.1021/nl203169t	journal	January 2012
Direct Observation of Nanoscale Peltier and Joule Effects at Metal–Insulator Domain Walls in Vanadium Dioxide Nanobeams Favaloro, Tela; Suh, Joonki; Vermeersch, Bjorn Nano Letters, Vol. 14, Issue 5 https://doi.org/10.1021/nl500042x	journal	April 2014
Scaling of High-Field Transport and Localized Heating in Graphene Transistors Bae, Myung-Ho; Islam, Sharnali; Dorgan, Vincent E. ACS Nano, Vol. 5, Issue 10 https://doi.org/10.1021/nn202239y	journal	September 2011
Quantitative Measurement with Scanning Thermal Microscope by Preventing the Distortion Due to the Heat Transfer through the Air Kim, Kyeongtae; Chung, Jaehun; Hwang, Gwangseok ACS Nano, Vol. 5, Issue 11 https://doi.org/10.1021/nn2026325	journal	October 2011
Temperature mapping of operating nanoscale devices by scanning probe thermometry Menges, Fabian; Mensch, Philipp; Schmid, Heinz Nature Communications, Vol. 7, Issue 1 https://doi.org/10.1038/ncomms10874	journal	March 2016
Graphene quilts for thermal management of high-power GaN transistors Yan, Zhong; Liu, Guanxiong; Khan, Javed M. Nature Communications, Vol. 3, Issue 1 https://doi.org/10.1038/ncomms1828	journal	January 2012
Nanoscale Joule heating, Peltier cooling and current crowding at graphene–metal contacts Grosse, Kyle L.; Bae, Myung-Ho; Lian, Feifei Nature Nanotechnology, Vol. 6, Issue 5, p. 287-290 https://doi.org/10.1038/nnano.2011.39	journal	April 2011
Integrated finely tunable microring laser on silicon Liang, D.; Huang, X.; Kurczveil, G. Nature Photonics, Vol. 10, Issue 11 https://doi.org/10.1038/nphoton.2016.163	journal	September 2016
Full-field thermal imaging of quasiballistic crosstalk reduction in nanoscale devices Ziabari, Amirkoushyar; Torres, Pol; Vermeersch, Bjorn Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-017-02652-4	journal	January 2018
Thermometry at the nanoscale Brites, Carlos D. S.; Lima, Patricia P.; Silva, Nuno J. O. Nanoscale, Vol. 4, Issue 16 https://doi.org/10.1039/c2nr30663h	journal	January 2012
Thermal imaging by atomic force microscopy using thermocouple cantilever probes Majumdar, A.; Lai, J.; Chandrachood, M. Review of Scientific Instruments, Vol. 66, Issue 6 https://doi.org/10.1063/1.1145474	journal	June 1995
Temperature dependence of Raman scattering in single crystal GaN films Liu, Ming S.; Bursill, Les A.; Prawer, S. Applied Physics Letters, Vol. 74, Issue 21 https://doi.org/10.1063/1.124083	journal	May 1999
Nanoscale mapping of temperature and defect evolution inside operating AlGaN/GaN high electron mobility transistors Lin, Chung-Han; Merz, T. A.; Doutt, D. R. Applied Physics Letters, Vol. 95, Issue 3 https://doi.org/10.1063/1.3189102	journal	July 2009
Thermoreflectance imaging of sub 100 ns pulsed cooling in high-speed thermoelectric microcoolers Vermeersch, Bjorn; Bahk, Je-Hyeong; Christofferson, James Journal of Applied Physics, Vol. 113, Issue 10 https://doi.org/10.1063/1.4794166	journal	March 2013
Nanoscale thermal transport. II. 2003–2012 Cahill, David G.; Braun, Paul V.; Chen, Gang Applied Physics Reviews, Vol. 1, Issue 1 https://doi.org/10.1063/1.4832615	journal	March 2014
Super-Joule heating in graphene and silver nanowire network Maize, Kerry; Das, Suprem R.; Sadeque, Sajia Applied Physics Letters, Vol. 106, Issue 14 https://doi.org/10.1063/1.4916943	journal	April 2015
Nanoscale thermometry by scanning thermal microscopy Menges, Fabian; Riel, Heike; Stemmer, Andreas Review of Scientific Instruments, Vol. 87, Issue 7 https://doi.org/10.1063/1.4955449	journal	July 2016
Evaluating Broader Impacts of Nanoscale Thermal Transport Research Shi, Li; Dames, Chris; Lukes, Jennifer R. Nanoscale and Microscale Thermophysical Engineering, Vol. 19, Issue 2 https://doi.org/10.1080/15567265.2015.1031857	journal	April 2015
Emergence of hydrodynamic heat transport in semiconductors at the nanoscale Torres, P.; Ziabari, A.; Torelló, A. Physical Review Materials, Vol. 2, Issue 7 https://doi.org/10.1103/PhysRevMaterials.2.076001	journal	July 2018
Limits of lithography Harriott, L. R. Proceedings of the IEEE, Vol. 89, Issue 3 https://doi.org/10.1109/5.915379	journal	March 2001
A generalized Gaussian image model for edge-preserving MAP estimation Bouman, C.; Sauer, K. IEEE Transactions on Image Processing, Vol. 2, Issue 3 https://doi.org/10.1109/83.236536	journal	July 1993
A unified approach to statistical tomography using coordinate descent optimization Bouman, C. A.; Sauer, K. IEEE Transactions on Image Processing, Vol. 5, Issue 3 https://doi.org/10.1109/83.491321	journal	March 1996
ML parameter estimation for Markov random fields with applications to Bayesian tomography Saquib, S. S.; Bouman, C. A.; Sauer, K. IEEE Transactions on Image Processing, Vol. 7, Issue 7 https://doi.org/10.1109/83.701163	journal	July 1998
Power Trace: An Efficient Method for Extracting the Power Dissipation Profile in an IC Chip From Its Temperature Map Wang, Xi; Farsiu, Sina; Milanfar, Peyman IEEE Transactions on Components and Packaging Technologies, Vol. 32, Issue 2 https://doi.org/10.1109/TCAPT.2009.2017204	journal	June 2009
Plug-and-Play Priors for Bright Field Electron Tomography and Sparse Interpolation Sreehari, Suhas; Venkatakrishnan, Singanallur V.; Wohlberg, Brendt IEEE Transactions on Computational Imaging https://doi.org/10.1109/TCI.2016.2599778	journal	January 2016
Direct Observation of Self-Heating in III–V Gate-All-Around Nanowire MOSFETs Shin, SangHoon; Wahab, Muhammad Abdul; Masuduzzaman, Muhammad IEEE Transactions on Electron Devices, Vol. 62, Issue 11 https://doi.org/10.1109/TED.2015.2444879	journal	November 2015
Imaging Below the Diffraction Limit: A Statistical Analysis Shahram, M.; Milanfar, P. IEEE Transactions on Image Processing, Vol. 13, Issue 5 https://doi.org/10.1109/TIP.2004.826096	journal	May 2004
A New SURE Approach to Image Denoising: Interscale Orthonormal Wavelet Thresholding Luisier, Florian; Blu, Thierry; Unser, Michael IEEE Transactions on Image Processing, Vol. 16, Issue 3 https://doi.org/10.1109/TIP.2007.891064	journal	March 2007
Monte-Carlo Sure: A Black-Box Optimization of Regularization Parameters for General Denoising Algorithms Ramani, S.; Blu, T.; Unser, M. IEEE Transactions on Image Processing, Vol. 17, Issue 9 https://doi.org/10.1109/TIP.2008.2001404	journal	September 2008
Fast Model-Based X-Ray CT Reconstruction Using Spatially Nonhomogeneous ICD Optimization Yu, Zhou; Thibault, Jean-Baptiste; Bouman, Charles A. IEEE Transactions on Image Processing, Vol. 20, Issue 1 https://doi.org/10.1109/TIP.2010.2058811	journal	January 2011
Lowering HAMR Near-Field Transducer Temperature via Inverse Electromagnetic Design Bhargava, Samarth; Yablonovitch, Eli IEEE Transactions on Magnetics, Vol. 51, Issue 4 https://doi.org/10.1109/TMAG.2014.2355215	journal	April 2015
A SURE Approach for Digital Signal/Image Deconvolution Problems Pesquet, J. -C.; Benazza-Benyahia, A.; Chaux, C. IEEE Transactions on Signal Processing, Vol. 57, Issue 12 https://doi.org/10.1109/TSP.2009.2026077	journal	December 2009
A three-dimensional statistical approach to improved image quality for multislice helical CT: Improved statistical reconstruction for multislice helical CT Thibault, Jean-Baptiste; Sauer, Ken D.; Bouman, Charles A. Medical Physics, Vol. 34, Issue 11 https://doi.org/10.1118/1.2789499	journal	October 2007
Nanoscale temperature mapping in operating microelectronic devices Mecklenburg, Matthew; Hubbard, William A.; White, E. R. Science, Vol. 347, Issue 6222 https://doi.org/10.1126/science.aaa2433	journal	February 2015
Optimal Regularized Reconstruction in Computerized Tomography Girard, Didier A. SIAM Journal on Scientific and Statistical Computing, Vol. 8, Issue 6 https://doi.org/10.1137/0908076	journal	November 1987
Optically coherent image formation and denoising using a plug and play inversion framework Pellizzari, Casey J.; Trahan, Russell; Zhou, Hanying Applied Optics, Vol. 56, Issue 16 https://doi.org/10.1364/AO.56.004735	journal	January 2017
Resolving the thermal challenges for silicon microring resonator devices Padmaraju, Kishore; Bergman, Keren Nanophotonics, Vol. 3, Issue 4-5 https://doi.org/10.1515/nanoph-2013-0013	journal	January 2014
Risk estimators for choosing regularization parameters in ill-posed problems - properties and limitations Lucka, Felix; Proksch, Katharina; Brune, Christoph Inverse Problems & Imaging, Vol. 12, Issue 5 https://doi.org/10.3934/ipi.2018047	journal	January 2018

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