Method and Apparatus for Semiconductor Defect Characterization
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
This report documents efforts to develop a wafer mapping measurement system for semiconductor characterization.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000; NA0003525
- OSTI ID:
- 1592874
- Report Number(s):
- SAND--2019-14890; 682050
- Country of Publication:
- United States
- Language:
- English
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