Schottky Barrier Catalysis Mechanism in Metal-Assisted Chemical Etching of Silicon

Lai, Ruby A.; Hymel, Thomas M.; Narasimhan, Vijay K.; Cui, Yi

doi:10.1021/acsami.6b01020

Schottky Barrier Catalysis Mechanism in Metal-Assisted Chemical Etching of Silicon

Journal Article · Wed Apr 13 04:00:00 EDT 2016 · ACS Applied Materials and Interfaces

DOI:https://doi.org/10.1021/acsami.6b01020· OSTI ID:1256464

Lai, Ruby A.; Hymel, Thomas M.; Narasimhan, Vijay K.; Cui, Yi

View Accepted Manuscript (DOE)

Research Organization:: SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)

Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE)

Grant/Contract Number:: EE0004946; AC02-76SF00515

OSTI ID:: 1256464

Alternate ID(s):: OSTI ID: 1579822

Journal Information:: ACS Applied Materials and Interfaces, Journal Name: ACS Applied Materials and Interfaces Journal Issue: 14 Vol. 8; ISSN 1944-8244

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

References (28)

Metal-Assisted Chemical Etching of Silicon: A Review Huang, Zhipeng; Geyer, Nadine; Werner, Peter Advanced Materials, Vol. 23, Issue 2, p. 285-308 https://doi.org/10.1002/adma.201001784	journal	September 2010
The Richardson constant for thermionic emission in Schottky barrier diodes Crowell, C. R. Solid-State Electronics, Vol. 8, Issue 4 https://doi.org/10.1016/0038-1101(65)90116-4	journal	April 1965
Metal-silicon Schottky barriers Turner, M. J.; Rhoderick, E. H. Solid-State Electronics, Vol. 11, Issue 3 https://doi.org/10.1016/0038-1101(68)90041-5	journal	March 1968
Schottky barriers on p-type silicon Smith, B. L.; Rhoderick, E. H. Solid-State Electronics, Vol. 14, Issue 1 https://doi.org/10.1016/0038-1101(71)90049-9	journal	January 1971
Micromachining applications of porous silicon Steiner, P.; Lang, W. Thin Solid Films, Vol. 255, Issue 1-2 https://doi.org/10.1016/0040-6090(95)91137-B	journal	January 1995
Au-assisted electroless etching of silicon in aqueous HF/H2O2 solution Megouda, Nacéra; Hadjersi, Toufik; Piret, Gaëlle Applied Surface Science, Vol. 255, Issue 12 https://doi.org/10.1016/j.apsusc.2009.01.075	journal	April 2009
Metal assisted chemical etching for high aspect ratio nanostructures: A review of characteristics and applications in photovoltaics Li, Xiuling Current Opinion in Solid State and Materials Science, Vol. 16, Issue 2, p. 71-81 https://doi.org/10.1016/j.cossms.2011.11.002	journal	April 2012
Metal-assisted chemical etching of silicon in HF–H₂O₂ Chartier, C.; Bastide, S.; Lévy-Clément, C. Electrochimica Acta, Vol. 53, Issue 17, p. 5509-5516 https://doi.org/10.1016/j.electacta.2008.03.009	journal	July 2008
Hybrid Metal–Semiconductor Nanostructure for Ultrahigh Optical Absorption and Low Electrical Resistance at Optoelectronic Interfaces Narasimhan, Vijay K.; Hymel, Thomas M.; Lai, Ruby A. ACS Nano, Vol. 9, Issue 11 https://doi.org/10.1021/acsnano.5b04034	journal	October 2015
Uniform Vertical Trench Etching on Silicon with High Aspect Ratio by Metal-Assisted Chemical Etching Using Nanoporous Catalysts Li, Liyi; Liu, Yan; Zhao, Xueying ACS Applied Materials & Interfaces, Vol. 6, Issue 1 https://doi.org/10.1021/am4046519	journal	November 2013
Anisotropic Nanoparticles as Shape-Directing Catalysts for the Chemical Etching of Silicon Liu, Guoliang; Young, Kaylie L.; Liao, Xing Journal of the American Chemical Society, Vol. 135, Issue 33 https://doi.org/10.1021/ja4061867	journal	August 2013
Preparation of Large-Area Uniform Silicon Nanowires Arrays through Metal-Assisted Chemical Etching Zhang, Ming-Liang; Peng, Kui-Qing; Fan, Xia The Journal of Physical Chemistry C, Vol. 112, Issue 12 https://doi.org/10.1021/jp077053o	journal	March 2008
Model for the Mass Transport during Metal-Assisted Chemical Etching with Contiguous Metal Films As Catalysts Geyer, Nadine; Fuhrmann, Bodo; Huang, Zhipeng The Journal of Physical Chemistry C, Vol. 116, Issue 24 https://doi.org/10.1021/jp3034227	journal	June 2012
Mechanics of Catalyst Motion during Metal Assisted Chemical Etching of Silicon Lai, Chang Quan; Cheng, He; Choi, W. K. The Journal of Physical Chemistry C, Vol. 117, Issue 40 https://doi.org/10.1021/jp407561k	journal	September 2013
Oxidation Rate Effect on the Direction of Metal-Assisted Chemical and Electrochemical Etching of Silicon Huang, Zhipeng; Shimizu, Tomohiro; Senz, Stephan The Journal of Physical Chemistry C, Vol. 114, Issue 24 https://doi.org/10.1021/jp911121q	journal	May 2010
Ultra-high aspect ratio high-resolution nanofabrication for hard X-ray diffractive optics Chang, Chieh; Sakdinawat, Anne Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms5243	journal	June 2014
Biodegradable luminescent porous silicon nanoparticles for in vivo applications Park, Ji-Ho; Gu, Luo; von Maltzahn, Geoffrey Nature Materials, Vol. 8, Issue 4, p. 331-336 https://doi.org/10.1038/nmat2398	journal	February 2009
High-performance lithium battery anodes using silicon nanowires Chan, Candace K.; Peng, Hailin; Liu, Gao Nature Nanotechnology, Vol. 3, Issue 1, p. 31-35 https://doi.org/10.1038/nnano.2007.411	journal	December 2007
Metal assisted anodic etching of silicon Lai, Chang Quan; Zheng, Wen; Choi, W. K. Nanoscale, Vol. 7, Issue 25 https://doi.org/10.1039/C5NR01916H	journal	January 2015
Metal-assisted chemical etching in HF/H2O2 produces porous silicon Li, X.; Bohn, P. W. Applied Physics Letters, Vol. 77, Issue 16 https://doi.org/10.1063/1.1319191	journal	October 2000
In-plane control of morphology and tunable photoluminescence in porous silicon produced by metal-assisted electroless chemical etching Chattopadhyay, Soma; Li, Xiuling; Bohn, Paul W. Journal of Applied Physics, Vol. 91, Issue 9 https://doi.org/10.1063/1.1465123	journal	May 2002
High aspect ratio silicon etch: A review Wu, Banqiu; Kumar, Ajay; Pamarthy, Sharma Journal of Applied Physics, Vol. 108, Issue 5 https://doi.org/10.1063/1.3474652	journal	September 2010
Measurements of the rectifying barrier heights of various rhodium silicides with n ‐silicon de Sousa Pires, J.; d’Heurle, F.; Norde, H. Applied Physics Letters, Vol. 36, Issue 2 https://doi.org/10.1063/1.91412	journal	January 1980
Deep anisotropic etching of silicon Aachboun, S.; Ranson, P. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 17, Issue 4 https://doi.org/10.1116/1.581759	journal	July 1999
Polymer Replicas of Photonic Porous Silicon for Sensing and Drug Delivery Applications Li, Y. Y. Science, Vol. 299, Issue 5615 https://doi.org/10.1126/science.1081298	journal	March 2003
Charge Transport in Uniform Metal-Assisted Chemical Etching for 3D High-Aspect-Ratio Micro- and Nanofabrication on Silicon Li, Liyi; Zhao, Xueying; Wong, Ching-Ping ECS Journal of Solid State Science and Technology, Vol. 4, Issue 9 https://doi.org/10.1149/2.0201508jss	journal	January 2015
Catalytic activity of noble metals for metal-assisted chemical etching of silicon Yae, Shinji; Morii, Yuma; Fukumuro, Naoki Nanoscale Research Letters, Vol. 7, Issue 1 https://doi.org/10.1186/1556-276X-7-352	journal	June 2012
Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells Wang, Dong; Ji, Ran; Du, Song Nanoscale Research Letters, Vol. 8, Issue 1 https://doi.org/10.1186/1556-276X-8-42	journal	January 2013

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Enhanced Surface Properties of Light-Trapping Si Nanowires Using Synergetic Effects of Metal-Assisted and Anisotropic Chemical Etchings Jeong, Youngsoon; Hong, Chanwoo; Jung, Yeong Hun Scientific Reports, Vol. 9, Issue 1 https://doi.org/10.1038/s41598-019-52382-4	journal	November 2019
Contact electrification induced interfacial reactions and direct electrochemical nanoimprint lithography in n-type gallium arsenate wafer Zhang, Jie; Zhang, Lin; Wang, Wei Chemical Science, Vol. 8, Issue 3 https://doi.org/10.1039/c6sc04091h	journal	January 2017
Unraveling the Morphological Evolution and Etching Kinetics of Porous Silicon Nanowires During Metal-Assisted Chemical Etching Vinzons, Lester U.; Shu, Lei; Yip, SenPo Nanoscale Research Letters, Vol. 12, Issue 1 https://doi.org/10.1186/s11671-017-2156-z	journal	June 2017
Low Cost and High‐Aspect Ratio Micro/Nano Device Fabrication by Using Innovative Metal‐Assisted Chemical Etching Method Van Toan, Nguyen; Wang, Xiaoyue; Inomata, Naoki Advanced Engineering Materials, Vol. 21, Issue 8 https://doi.org/10.1002/adem.201900490	journal	May 2019
Interfacial Contact is Required for Metal-Assisted Plasma Etching of Silicon Sun, Julia B.; Almquist, Benjamin D. Advanced Materials Interfaces, Vol. 5, Issue 24 https://doi.org/10.1002/admi.201800836	journal	October 2018
Oxidant Concentration Modulated Metal/Silicon Interface Electrical Field Mediates Metal‐Assisted Chemical Etching of Silicon Wang, Jiang; Hu, Ya; Zhao, Haichuan Advanced Materials Interfaces, Vol. 5, Issue 23 https://doi.org/10.1002/admi.201801132	journal	August 2018
Quasi-Amorphous Metallic Nickel Nanopowder as an Efficient and Durable Electrocatalyst for Alkaline Hydrogen Evolution Zhang, Doudou; Shi, Jingying; Qi, Yu Advanced Science, Vol. 5, Issue 12 https://doi.org/10.1002/advs.201801216	journal	October 2018
Minimization of Optical Reflectance by Copper Assisted Etching of Crystalline Silicon Surface Treideris, Marius; Rėza, Alfonsas; Kamarauskas, Mindaugas physica status solidi (a), Vol. 215, Issue 6 https://doi.org/10.1002/pssa.201700600	journal	January 2018
Hybrid Anodic and Metal-Assisted Chemical Etching Method Enabling Fabrication of Silicon Carbide Nanowires Chen, Yun; Zhang, Cheng; Li, Liyi Small, Vol. 15, Issue 7 https://doi.org/10.1002/smll.201803898	journal	January 2019
Metal Nanoparticle-Decorated Silicon Nanowire Arrays on Silicon Substrate and their Applications Roy, Abhijit; Satpati, Biswarup Microscopy and Microanalysis, Vol. 25, Issue 6 https://doi.org/10.1017/s1431927619014946	journal	September 2019
General corrosion during metal-assisted etching of n -type silicon using different metal catalysts of silver, gold, and platinum Matsumoto, Ayumu; Son, Hikoyoshi; Eguchi, Makiho RSC Advances, Vol. 10, Issue 1 https://doi.org/10.1039/c9ra08728a	journal	January 2020
High-aspect-ratio microstructures with versatile slanting angles on silicon by uniform metal-assisted chemical etching Li, Liyi; Zhang, Cheng; Tuan, Chia-Chi Journal of Micromechanics and Microengineering, Vol. 28, Issue 5 https://doi.org/10.1088/1361-6439/aaaf2f	journal	March 2018
Metal-assisted-chemical-etching of silicon nanowires for templating 3D graphene growth towards energy storage in microsystems Li, Jinhua; Van Toan, Nguyen; Wang, Zhuqing Journal of Micromechanics and Microengineering, Vol. 29, Issue 5 https://doi.org/10.1088/1361-6439/ab0b2f	journal	March 2019
Communication—Black GaAs with Sub-Wavelength Nanostructures Fabricated via Lithography-Free Metal-Assisted Chemical Etching Wilhelm, Thomas S.; Kolberg, Alex P.; Baboli, Mohadeseh A. ECS Journal of Solid State Science and Technology, Vol. 8, Issue 6 https://doi.org/10.1149/2.0311906jss	journal	January 2019

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