Apparatus for controlling heat flow within a silicon melt
Patent
·
OSTI ID:1576302
An apparatus for controlling heat flow within a melt. The apparatus may include a crucible configured to contain the melt where the melt has an exposed surface. The apparatus may also include a heater disposed below a first side of the crucible and configured to supply heat through the melt to the exposed surface, and a heat diffusion barrier assembly comprising at least one heat diffusion barrier disposed within the crucible and defining an isolation region in the melt and an outer region in the melt.
- Research Organization:
- Varian Semiconductor Equipment Associates, Inc, Gloucester, MA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- EE0000595
- Assignee:
- Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
- Patent Number(s):
- 10,415,151
- OSTI ID:
- 1576302
- Country of Publication:
- United States
- Language:
- English
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