Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Multidimensional thermal analysis of an ultrawide bandgap AlGaN channel high electron mobility transistor

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.5115013· OSTI ID:1570273
 [1];  [1];  [1];  [2];  [2];  [2];  [2];  [2];  [2];  [1];  [1];  [1];  [3];  [1];  [1];  [1];  [1]
  1. Pennsylvania State Univ., University Park, PA (United States)
  2. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
  3. Air Force Research Lab. (AFRL), Wright-Patterson AFB, OH (United States)
Improvements in radio frequency and power electronics can potentially be realized with ultrawide bandgap materials such as aluminum gallium nitride (AlxGa1-xN). Multidimensional thermal characterization of an Al0.30Ga0.70N channel high electron mobility transistor (HEMT) was done using Raman spectroscopy and thermoreflectance thermal imaging to experimentally determine the lateral and vertical steady-state operating temperature profiles. An electrothermal model of the Al0.30Ga0.70N channel HEMT was developed to validate the experimental results and investigate potential device-level thermal management. While the low thermal conductivity of this III-N ternary alloy system results in more device self-heating at room temperature, the temperature insensitive thermal and electrical output characteristics of AlxGa1-xN may open the door for extreme temperature applications.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
Grant/Contract Number:
AC04-94AL85000
OSTI ID:
1570273
Report Number(s):
SAND--2019-11875J; 679962
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 15 Vol. 115; ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English

References (41)

Ohmic contacts to Al-rich AlGaN heterostructures: Ohmic contacts to Al-rich AlGaN heterostructures journal June 2017
Study of two-dimensional electron gas in AlGaN channel HEMTs with high crystalline quality journal May 2010
Raman spectroscopy of GaN, AlGaN and AlN for process and growth monitoring/control journal January 2001
A comparative study of surface passivation on AlGaN/GaN HEMTs journal September 2002
Electrical and structural dependence of operating temperature of AlGaN/GaN HEMTs journal June 2013
Temperature dependent analytical model for current–voltage characteristics of AlGaN/GaN power HEMT journal March 2009
Optical pump-and-probe measurement of the thermal conductivity of nitride thin films journal October 2002
Thermal conduction in AlxGa1−xN alloys and thin films journal April 2005
Micro-Raman thermometry in the presence of complex stresses in GaN devices journal June 2008
A frequency-domain thermoreflectance method for the characterization of thermal properties journal September 2009
Simultaneous measurement of temperature and thermal stress in AlGaN/GaN high electron mobility transistors using Raman scattering spectroscopy journal November 2009
Size dictated thermal conductivity of GaN journal September 2016
AlGaN channel field effect transistors with graded heterostructure ohmic contacts journal September 2016
Thickness dependent thermal conductivity of gallium nitride journal January 2017
Thermal characterization of gallium nitride p-i-n diodes journal February 2018
Electro-thermo-mechanical modeling of GaN-based HFETs and MOSHFETs journal June 2011
Enhancement of breakdown voltage in AlGaN/GaN high electron mobility transistors using a field plate journal January 2001
Operation Up to 500 °C of Al 0.85 Ga 0.15 N/Al 0.7 Ga 0.3 N High Electron Mobility Transistors journal January 2019
Reducing Thermal Resistance of AlGaN/GaN Electronic Devices Using Novel Nucleation Layers journal February 2009
Generation-After-Next Power Electronics: Ultrawide-bandgap devices, high-temperature packaging, and magnetic nanocomposite materials journal March 2017
Fundamental Cooling Limits for High Power Density Gallium Nitride Electronics journal June 2015
Thermal Design and Characterization of Heterogeneously Integrated InGaP/GaAs HBTs journal May 2016
Heat Dissipation in High-Power GaN Electronics on Thermally Resistive Substrates journal August 2005
Integrated micro-Raman/infrared thermography probe for monitoring of self-heating in AlGaN/GaN transistor structures journal October 2006
Simulation of Life Testing Procedures for Estimating Long-Term Degradation and Lifetime of AlGaN/GaN HEMTs journal October 2008
The Study of Self-Heating and Hot-Electron Effects for AlGaN/GaN Double-Channel HEMTs journal May 2012
The Impact of Bias Conditions on Self-Heating in AlGaN/GaN HEMTs journal January 2013
AlGaN Channel HEMT With Extremely High Breakdown Voltage journal March 2013
Thermometry of AlGaN/GaN HEMTs Using Multispectral Raman Features journal June 2013
A Numerical Study on Comparing the Active and Passive Cooling of AlGaN/GaN HEMTs journal December 2014
Bonding Pad Over Active Structure for Chip Shrinkage of High-Power AlGaN/GaN HFETs journal February 2016
High Al Composition AlGaN-Channel High-Electron-Mobility Transistor on AlN Substrate journal December 2010
AlGaN Channel High Electron Mobility Transistors: Device Performance and Power-Switching Figure of Merit journal May 2008
High Temperature Operation of Al 0.45 Ga 0.55 N/Al 0.30 Ga 0.70 N High Electron Mobility Transistors journal January 2017
Nanocrystalline Diamond Integration with III-Nitride HEMTs journal October 2016
Review—Ultra-Wide-Bandgap AlGaN Power Electronic Devices journal December 2016
Planar Ohmic Contacts to Al 0.45 Ga 0.55 N/Al 0.3 Ga 0.7 N High Electron Mobility Transistors journal January 2017
Analysis of 2D Transport and Performance Characteristics for Lateral Power Devices Based on AlGaN Alloys journal January 2017
GaN-Based High Temperature and Radiation-Hard Electronics for Harsh Environments journal June 2010
Confocal Raman Microscopy: Performance, Pitfalls, and Best Practice: Invited Lecture at the Symposium “50 Years of SAS: Looking to the Future with Vibrational Spectroscopy” at Pittcon 2008, New Orleans, Louisiana journal September 2009
Output power enhancement in AlGaN/GaN heterostructure field-effect transistors with multilevel metallization journal December 2016

Cited By (1)

Nanoscale electro-thermal interactions in AlGaN/GaN high electron mobility transistors journal January 2020

Similar Records

Ultrawide-bandgap semiconductors: An overview
Journal Article · Mon Dec 27 19:00:00 EST 2021 · Journal of Materials Research · OSTI ID:1883171

Extreme Temperature Operation of Ultra-Wide Bandgap AlGaN High Electron Mobility Transistors
Journal Article · Tue Jul 30 20:00:00 EDT 2019 · IEEE Transactions on Semiconductor Manufacturing · OSTI ID:1559515

High-frequency, high-power performance of AlGaN-channel high-electron-mobility transistors: an RF simulation study [High-frequency high power performance of AlGaN channel HEMTs: an RF simulation study]
Journal Article · Mon Apr 15 20:00:00 EDT 2019 · Japanese Journal of Applied Physics · OSTI ID:1515222

Related Subjects