CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures

Stanfield, P. R.; Leenheer, A. J.; Michael, C. P.; Sims, R.; Eichenfield, M.

doi:10.1364/OE.27.028588

Title: CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures

Journal Article · Fri Sep 20 00:00:00 EDT 2019 · Optics Express

DOI:https://doi.org/10.1364/OE.27.028588· OSTI ID:1563021

Stanfield, P. R.; Leenheer, A. J.; Michael, C. P.; Sims, R.; Eichenfield, M.

We demonstrate a platform for phase and amplitude modulation in silicon nitride photonic integrated circuits via piezo-optomechanical coupling using tightly mechanically coupled aluminum nitride actuators. The platform, fabricated in a CMOS foundry, enables scalable active photonic integrated circuits for visible wavelengths, and the piezoelectric actuation functions without performance degradation down to cryogenic temperatures. As an example of the potential of the platform, we demonstrate a compact (~40 µm diameter) silicon nitride ring resonator modulator operating at 780 nm with intrinsic quality factors in excess of 1.5 million, >10 dB change in extinction ratio with 2 V applied, a switching time less than 4 ns, and a switching energy of 0.5 pJ/bit. We characterize the exemplary device at room temperature and 7 K. At 7 K, the device obtains a resistance of approximately 20 teraohms, allowing it to operate with sub-picowatt electrical power dissipation. We further demonstrate a Mach-Zehnder modulator constructed in the same platform with piezoelectrically tunable phase shifting arms, with 750 ns switching time constant and 20 nW steady-state power dissipation at room temperature.

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000; NA0003525

OSTI ID:: 1563021

Alternate ID(s):: OSTI ID: 1574803

Report Number(s):: SAND2019-7490J; OPEXFF

Journal Information:: Optics Express, Journal Name: Optics Express Vol. 27 Journal Issue: 20; ISSN 1094-4087

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 27 works

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