High-speed programmable photonic circuits in a cryogenically compatible, visible–near-infrared 200 mm CMOS architecture

Dong, Mark; Clark, Genevieve; Leenheer, Andrew J.; Zimmermann, Matthew; Dominguez, Daniel; Menssen, Adrian J.; Heim, David; Gilbert, Gerald; Englund, Dirk; Eichenfield, Matt

doi:10.1038/s41566-021-00903-x

High-speed programmable photonic circuits in a cryogenically compatible, visible–near-infrared 200 mm CMOS architecture

Journal Article · Sun Dec 12 23:00:00 EST 2021 · Nature Photonics

DOI:https://doi.org/10.1038/s41566-021-00903-x· OSTI ID:1835498

; Clark, Genevieve; Leenheer, Andrew J.; Zimmermann, Matthew; Dominguez, Daniel; Menssen, Adrian J.; ; ; ;

Abstract

Recent advances in photonic integrated circuits have enabled a new generation of programmable Mach–Zehnder meshes (MZMs) realized by using cascaded Mach–Zehnder interferometers capable of universal linear-optical transformations on N input/output optical modes. MZMs serve critical functions in photonic quantum information processing, quantum-enhanced sensor networks, machine learning and other applications. However, MZM implementations reported to date rely on thermo-optic phase shifters, which limit applications due to slow response times and high power consumption. Here we introduce a large-scale MZM platform made in a 200 mm complementary metal–oxide–semiconductor foundry, which uses aluminium nitride piezo-optomechanical actuators coupled to silicon nitride waveguides, enabling low-loss propagation with phase modulation at greater than 100 MHz in the visible–near-infrared wavelengths. Moreover, the vanishingly low hold-power consumption of the piezo-actuators enables these photonic integrated circuits to operate at cryogenic temperatures, paving the way for a fully integrated device architecture for a range of quantum applications.

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Sponsoring Organization:: USDOE

Grant/Contract Number:: NONE; SC0012704

OSTI ID:: 1835498

Alternate ID(s):: OSTI ID: 1841110

Journal Information:: Nature Photonics, Journal Name: Nature Photonics Journal Issue: 1 Vol. 16; ISSN 1749-4885

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United Kingdom

Language:: English

References (48)

Stress effects on the performance of optical waveguides Huang, M. International Journal of Solids and Structures, Vol. 40, Issue 7 https://doi.org/10.1016/S0020-7683(03)00037-4	journal	April 2003
A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication Olsson, Roy H.; Hattar, Khalid; Homeijer, Sara J. Sensors and Actuators A: Physical, Vol. 209, p. 183-190 https://doi.org/10.1016/j.sna.2014.01.033	journal	March 2014
Architecture for a large-scale ion-trap quantum computer Kielpinski, D.; Monroe, C.; Wineland, D. J. Nature, Vol. 417, Issue 6890 https://doi.org/10.1038/nature00784	journal	June 2002
On-chip detection of non-classical light by scalable integration of single-photon detectors Najafi, Faraz; Mower, Jacob; Harris, Nicholas C. Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms6873	journal	January 2015
Integrated optical addressing of an ion qubit Mehta, Karan K.; Bruzewicz, Colin D.; McConnell, Robert Nature Nanotechnology, Vol. 11, Issue 12 https://doi.org/10.1038/nnano.2016.139	journal	August 2016
Quantum transport simulations in a programmable nanophotonic processor Harris, Nicholas C.; Steinbrecher, Gregory R.; Prabhu, Mihika Nature Photonics, Vol. 11, Issue 7 https://doi.org/10.1038/nphoton.2017.95	journal	June 2017
Reconfigurable photonics with on-chip single-photon detectors Gyger, Samuel; Zichi, Julien; Schweickert, Lucas Nature Communications, Vol. 12, Issue 1 https://doi.org/10.1038/s41467-021-21624-3	journal	March 2021
Percolation-based architecture for cluster state creation using photon-mediated entanglement between atomic memories Choi, Hyeongrak; Pant, Mihir; Guha, Saikat npj Quantum Information, Vol. 5, Issue 1 https://doi.org/10.1038/s41534-019-0215-2	journal	November 2019
Hybrid integrated quantum photonic circuits Elshaari, Ali W.; Pernice, Wolfram; Srinivasan, Kartik Nature Photonics, Vol. 14, Issue 5 https://doi.org/10.1038/s41566-020-0609-x	journal	April 2020
Material platforms for spin-based photonic quantum technologies Atatüre, Mete; Englund, Dirk; Vamivakas, Nick Nature Reviews Materials, Vol. 3, Issue 5 https://doi.org/10.1038/s41578-018-0008-9	journal	April 2018
Large-scale integration of artificial atoms in hybrid photonic circuits Wan, Noel H.; Lu, Tsung-Ju; Chen, Kevin C. Nature, Vol. 583, Issue 7815 https://doi.org/10.1038/s41586-020-2441-3	journal	July 2020
Monolithic piezoelectric control of soliton microcombs Liu, Junqiu; Tian, Hao; Lucas, Erwan Nature, Vol. 583, Issue 7816 https://doi.org/10.1038/s41586-020-2465-8	journal	July 2020
Programmable photonic circuits Bogaerts, Wim; Pérez, Daniel; Capmany, José Nature, Vol. 586, Issue 7828 https://doi.org/10.1038/s41586-020-2764-0	journal	October 2020
Inference in artificial intelligence with deep optics and photonics Wetzstein, Gordon; Ozcan, Aydogan; Gigan, Sylvain Nature, Vol. 588, Issue 7836 https://doi.org/10.1038/s41586-020-2973-6	journal	December 2020
Quantum circuits with many photons on a programmable nanophotonic chip Arrazola, J. M.; Bergholm, V.; Brádler, K. Nature, Vol. 591, Issue 7848 https://doi.org/10.1038/s41586-021-03202-1	journal	March 2021
A CMOS-integrated quantum sensor based on nitrogen–vacancy centres Kim, Donggyu; Ibrahim, Mohamed I.; Foy, Christopher Nature Electronics, Vol. 2, Issue 7 https://doi.org/10.1038/s41928-019-0275-5	journal	July 2019
Aluminum nitride piezo-acousto-photonic crystal nanocavity with high quality factors Fan, Linran; Sun, Xiankai; Xiong, Chi Applied Physics Letters, Vol. 102, Issue 15 https://doi.org/10.1063/1.4802250	journal	April 2013
Independent indistinguishable quantum light sources on a reconfigurable photonic integrated circuit Ellis, D. J. P.; Bennett, A. J.; Dangel, C. Applied Physics Letters, Vol. 112, Issue 21 https://doi.org/10.1063/1.5028339	journal	May 2018
Low-loss integrated photonics for the blue and ultraviolet regime West, Gavin N.; Loh, William; Kharas, Dave APL Photonics, Vol. 4, Issue 2 https://doi.org/10.1063/1.5052502	journal	February 2019
NbTiN thin films for superconducting photon detectors on photonic and two-dimensional materials Steinhauer, Stephan; Yang, Lily; Gyger, Samuel Applied Physics Letters, Vol. 116, Issue 17 https://doi.org/10.1063/1.5143986	journal	April 2020
Perturbation theory for Maxwell’s equations with shifting material boundaries Johnson, Steven G.; Ibanescu, M.; Skorobogatiy, M. A. Physical Review E, Vol. 65, Issue 6 https://doi.org/10.1103/PhysRevE.65.066611	journal	June 2002
Parallel Implementation of High-Fidelity Multiqubit Gates with Neutral Atoms Levine, Harry; Keesling, Alexander; Semeghini, Giulia Physical Review Letters, Vol. 123, Issue 17 https://doi.org/10.1103/PhysRevLett.123.170503	journal	October 2019
Experimental realization of any discrete unitary operator Reck, Michael; Zeilinger, Anton; Bernstein, Herbert J. Physical Review Letters, Vol. 73, Issue 1 https://doi.org/10.1103/PhysRevLett.73.58	journal	July 1994
Large-Scale Optical Neural Networks Based on Photoelectric Multiplication Hamerly, Ryan; Bernstein, Liane; Sludds, Alexander Physical Review X, Vol. 9, Issue 2 https://doi.org/10.1103/PhysRevX.9.021032	journal	May 2019
Band Pass Filters Based on GaN/Si Lumped-Element SAW Resonators Operating at Frequencies Above 5 GHz Neculoiu, Dan; Bunea, Alina-Cristina; Dinescu, Adrian M. IEEE Access, Vol. 6 https://doi.org/10.1109/ACCESS.2018.2867456	journal	January 2018
Cryo-CMOS Circuits and Systems for Quantum Computing Applications Patra, Bishnu; Incandela, Rosario M.; van Dijk, Jeroen P. G. IEEE Journal of Solid-State Circuits, Vol. 53, Issue 1 https://doi.org/10.1109/JSSC.2017.2737549	journal	January 2018
High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detection of Diamond Color Centers Ibrahim, Mohamed I.; Foy, Christopher; Englund, Dirk R. IEEE Journal of Solid-State Circuits, Vol. 56, Issue 3 https://doi.org/10.1109/JSSC.2020.3027056	journal	March 2021
MEMS for Photonic Integrated Circuits Errando-Herranz, Carlos; Takabayashi, Alain Yuji; Edinger, Pierre IEEE Journal of Selected Topics in Quantum Electronics, Vol. 26, Issue 2 https://doi.org/10.1109/JSTQE.2019.2943384	journal	March 2020
Piezoelectric tuning of a suspended silicon nitride ring resonator Jin, W.; Stanton, E. J.; Volet, N. 2017 IEEE Photonics Conference (IPC) https://doi.org/10.1109/ipcon.2017.8116029	conference	October 2017
Deep learning with coherent nanophotonic circuits Shen, Yichen; Harris, Nicholas C.; Skirlo, Scott 2017 IEEE Photonics Society Summer Topical Meeting Series (SUM) https://doi.org/10.1109/phosst.2017.8012714	conference	July 2017
Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators Wojciechowski, K. E.; Olsson, R. H.; Tuck, M. R. Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International https://doi.org/10.1109/sensor.2009.5285626	conference	June 2009
Scandium aluminum nitride: Highly piezoelectric thin film for RF SAW devices in multi GHz range Teshigahara, Akihiko; Hashimoto, Ken-ya; Akiyama, Morito 2012 IEEE International Ultrasonics Symposium https://doi.org/10.1109/ultsym.2012.0481	conference	October 2012
Universal linear optics Carolan, J.; Harrold, C.; Sparrow, C. Science, Vol. 349, Issue 6249 https://doi.org/10.1126/science.aab3642	journal	July 2015
Principles, fundamentals, and applications of programmable integrated photonics Pérez, Daniel; Gasulla, Ivana; Das Mahapatra, Prometheus Advances in Optics and Photonics, Vol. 12, Issue 3 https://doi.org/10.1364/AOP.387155	journal	January 2020
Ultralow drive voltage silicon traveling-wave modulator Baehr-Jones, Tom; Ding, Ran; Liu, Yang Optics Express, Vol. 20, Issue 11 https://doi.org/10.1364/OE.20.012014	journal	January 2012
Direct characterization of linear-optical networks Rahimi-Keshari, Saleh; Broome, Matthew A.; Fickler, Robert Optics Express, Vol. 21, Issue 11 https://doi.org/10.1364/OE.21.013450	journal	January 2013
Efficient, compact and low loss thermo-optic phase shifter in silicon Harris, Nicholas C.; Ma, Yangjin; Mower, Jacob Optics Express, Vol. 22, Issue 9 https://doi.org/10.1364/OE.22.010487	journal	January 2014
Aluminum nitride integrated photonics platform for the ultraviolet to visible spectrum Lu, Tsung-Ju; Fanto, Michael; Choi, Hyeongrak Optics Express, Vol. 26, Issue 9 https://doi.org/10.1364/OE.26.011147	journal	January 2018
8×8 reconfigurable quantum photonic processor based on silicon nitride waveguides Taballione, Caterina; Wolterink, Tom A. W.; Lugani, Jasleen Optics Express, Vol. 27, Issue 19 https://doi.org/10.1364/OE.27.026842	journal	January 2019
CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures Stanfield, P. R.; Leenheer, A. J.; Michael, C. P. Optics Express, Vol. 27, Issue 20 https://doi.org/10.1364/OE.27.028588	journal	January 2019
Tolerant, broadband tunable 2 × 2 coupler circuit Wang, Mi; Ribero, Antonio; Xing, Yufei Optics Express, Vol. 28, Issue 4 https://doi.org/10.1364/OE.384018	journal	January 2020
Optimal design for universal multiport interferometers Clements, William R.; Humphreys, Peter C.; Metcalf, Benjamin J. Optica, Vol. 3, Issue 12 https://doi.org/10.1364/OPTICA.3.001460	journal	January 2016
Accelerating recurrent Ising machines in photonic integrated circuits Prabhu, Mihika; Roques-Carmes, Charles; Shen, Yichen Optica, Vol. 7, Issue 5 https://doi.org/10.1364/OPTICA.386613	journal	January 2020
Cryogenic microwave-to-optical conversion using a triply resonant lithium-niobate-on-sapphire transducer McKenna, Timothy P.; Witmer, Jeremy D.; Patel, Rishi N. Optica, Vol. 7, Issue 12 https://doi.org/10.1364/OPTICA.397235	journal	January 2020
Hardware error correction for programmable photonics Bandyopadhyay, Saumil; Hamerly, Ryan; Englund, Dirk Optica, Vol. 8, Issue 10 https://doi.org/10.1364/OPTICA.424052	journal	January 2021
Linear programmable nanophotonic processors Harris, Nicholas C.; Carolan, Jacques; Bunandar, Darius Optica, Vol. 5, Issue 12 https://doi.org/10.1364/OPTICA.5.001623	journal	January 2018
Ultra-low-loss integrated visible photonics using thin-film lithium niobate Desiatov, Boris; Shams-Ansari, Amirhassan; Zhang, Mian Optica, Vol. 6, Issue 3 https://doi.org/10.1364/OPTICA.6.000380	journal	January 2019
Nanomechanical single-photon routing Papon, Camille; Zhou, Xiaoyan; Thyrrestrup, Henri Optica, Vol. 6, Issue 4 https://doi.org/10.1364/OPTICA.6.000524	journal	January 2019

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