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Amorphous sulfide heterostructure precursors prepared by radio frequency sputtering

Journal Article · · Journal of Vacuum Science and Technology B
DOI:https://doi.org/10.1116/1.5099502· OSTI ID:1562872
 [1];  [2];  [2];  [3];  [2];  [2]
  1. National Renewable Energy Lab. (NREL), Golden, CO (United States); Univ. of Colorado, Boulder, CO (United States)
  2. National Renewable Energy Lab. (NREL), Golden, CO (United States)
  3. Univ. of Colorado, Boulder, CO (United States)
+ Show Author Affiliations
Two-dimensional sulfides and their heterostructures have emerged as potentially useful materials for technological applications. Controllable self-assembly of interleaved crystalline heterostructures from designed thin-film precursors has been demonstrated in selenide and telluride chemical systems, but not yet in sulfide chemistries. Preparing such amorphous sulfide heterostructure precursors is a necessary first step toward this goal. Here, deposition of thin-film amorphous precursors for layered sulfide heterostructures by RF sputtering is presented on the example of SnS-MoS2. Here, a calibration process specific to the mechanisms of RF sputtering from sulfide and disulfide compound targets is established. Precursor film structure and composition are confirmed via x-ray reflectivity and Rutherford backscattering measurements. Local nanostructure and composition are also examined by electron microscopy and electron energy loss spectroscopy.
Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Organization:
Laboratory Directed Research and Development (LDRD) Program; USDOE; USDOE National Renewable Energy Laboratory (NREL)
Grant/Contract Number:
AC36-08GO28308
OSTI ID:
1562872
Alternate ID(s):
OSTI ID: 1567942
Report Number(s):
NREL/JA--5K00-73503
Journal Information:
Journal of Vacuum Science and Technology B, Journal Name: Journal of Vacuum Science and Technology B Journal Issue: 5 Vol. 37; ISSN 2166-2746
Publisher:
American Vacuum Society/AIPCopyright Statement
Country of Publication:
United States
Language:
English

Figures / Tables (7)

FIG. 1(p. 5)figure FIG. 1
FIG. 2(p. 8)figure FIG. 2
FIG. 3(p. 11)figure FIG. 3
FIG. 4(p. 15)figure FIG. 4
TABLE I(p. 17)table TABLE I
FIG. 5(p. 18)figure FIG. 5
FIG. 6(p. 20)figure FIG. 6

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Related Subjects

14 SOLAR ENERGY
36 MATERIALS SCIENCE
Rutherford backscattering spectroscopy
electron energy loss spectroscopy
electron microscopy
heterostructures
sputter deposition
sulfur compounds
thin films