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Title: Design, Fabrication, and Characterization of a Piezoelectric AFM Cantilever Array

Abstract

Atomic force microscope (AFM) is a powerful instrument, which has been successfully employed in a myriad of applications from imaging to lithography, over the last decades. Despite its widespread use, low throughput of the AFM remains one of its major limitations along with slow scan rates in tapping mode. In this work, we propose a microfabricated cantilever array composed of five cantilevers, each equipped with onchip piezoelectric displacement sensors and an actuator for parallel imaging in tapping mode. The cantilevers are designed to have separate resonance frequencies in order to effectively minimize the vibrational coupling. The measured resonance frequencies range from 85.34 kHz to 107.78 kHz, and more than 5 kHz resonant frequency separation is achieved in the neighboring cantilevers. Vibrational coupling is mitigated by over two orders of magnitude compared to arrays with identical cantilevers. The common feedthrough problem in this type of active system is addressed by configuring the displacement sensors differentially. Finally, one of the cantilevers in the arrayis successfully employed for tapping mode AFM imaging.

Authors:
ORCiD logo [1];  [1];  [1]; ORCiD logo [1]
  1. University of Texas at Dallas
Publication Date:
Research Org.:
Univ. of Texas at Dallas, Richardson, TX (United States)
Sponsoring Org.:
USDOE Office of Energy Efficiency and Renewable Energy (EERE), Advanced Manufacturing Office (EE-5A)
OSTI Identifier:
1556929
DOE Contract Number:  
EE0008322
Resource Type:
Conference
Resource Relation:
Conference: IEEE Conference on Control Technology and Applications, Hong Kong, August 19-21, 2019
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; AFM; piezoelectric cantilever array; microfabrication; high-throughput

Citation Formats

Coskun, Mustafa Bulut, Baan, Marzieh, Alipour, Afshin, and Moheimani, S. O. Reza. Design, Fabrication, and Characterization of a Piezoelectric AFM Cantilever Array. United States: N. p., 2019. Web.
Coskun, Mustafa Bulut, Baan, Marzieh, Alipour, Afshin, & Moheimani, S. O. Reza. Design, Fabrication, and Characterization of a Piezoelectric AFM Cantilever Array. United States.
Coskun, Mustafa Bulut, Baan, Marzieh, Alipour, Afshin, and Moheimani, S. O. Reza. Mon . "Design, Fabrication, and Characterization of a Piezoelectric AFM Cantilever Array". United States. https://www.osti.gov/servlets/purl/1556929.
@article{osti_1556929,
title = {Design, Fabrication, and Characterization of a Piezoelectric AFM Cantilever Array},
author = {Coskun, Mustafa Bulut and Baan, Marzieh and Alipour, Afshin and Moheimani, S. O. Reza},
abstractNote = {Atomic force microscope (AFM) is a powerful instrument, which has been successfully employed in a myriad of applications from imaging to lithography, over the last decades. Despite its widespread use, low throughput of the AFM remains one of its major limitations along with slow scan rates in tapping mode. In this work, we propose a microfabricated cantilever array composed of five cantilevers, each equipped with onchip piezoelectric displacement sensors and an actuator for parallel imaging in tapping mode. The cantilevers are designed to have separate resonance frequencies in order to effectively minimize the vibrational coupling. The measured resonance frequencies range from 85.34 kHz to 107.78 kHz, and more than 5 kHz resonant frequency separation is achieved in the neighboring cantilevers. Vibrational coupling is mitigated by over two orders of magnitude compared to arrays with identical cantilevers. The common feedthrough problem in this type of active system is addressed by configuring the displacement sensors differentially. Finally, one of the cantilevers in the arrayis successfully employed for tapping mode AFM imaging.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {8}
}

Conference:
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