Effect of Substrate Orientation on the Crystal Quality and Surface Roughness of Nb-Doped TiO2 Epitaxial Films on TiO2

Gao, Yufei; Chambers, Scott A.

doi:10.1557/JMR.1996.0128

Effect of Substrate Orientation on the Crystal Quality and Surface Roughness of Nb-Doped TiO2 Epitaxial Films on TiO2

Journal Article · Mon Apr 15 04:00:00 EDT 1996 · Journal of Materials Research

DOI:https://doi.org/10.1557/JMR.1996.0128· OSTI ID:1542078

Gao, Yufei ^[1]; ^[1]

BATTELLE (PACIFIC NW LAB)

We have grown Nb-doped TiO2 epitaxial films on (100) and (110)-oriented TiO2 rutile substrate by molecular beam epitaxy. Nb substitutionally incorporates at cation sites in the rutile lattice, forming NbxTi1-xO2 solid solutions.

Research Organization:: Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC05-76RL01830

OSTI ID:: 1542078

Report Number(s):: PNNL-SA-26683

Journal Information:: Journal of Materials Research, Journal Name: Journal of Materials Research Journal Issue: 4 Vol. 11

Country of Publication:: United States

Language:: English

References (16)

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