Design and characterization of a microreactor for spatially confined atomic layer deposition and in situ UHV surface analysis
Journal Article
·
· Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- School of Chemical and Biomolecular Engineering Cornell University, Ithaca, New York 14853
Not provided.
- Research Organization:
- Cornell Univ., Ithaca, NY (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- SC0006647
- OSTI ID:
- 1541658
- Journal Information:
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 35, Issue 6; ISSN 0734-2101
- Publisher:
- American Vacuum Society
- Country of Publication:
- United States
- Language:
- English
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