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A theory of growing crystalline nanorods – Mode Ⅰ

Journal Article · · Surface Science
 [1];  [2]
  1. Northeastern University, Boston, MA (United States); DOE/OSTI
  2. Northeastern University, Boston, MA (United States)
Nanorods grow in two possible modes during physical vapor deposition (PVD). In mode I, monolayer surface steps dictate the diameter of nanorods. In mode II, multiple-layer surface steps dictate the diameter, which is the smallest possible under physical vapor deposition [5,10]. Here this paper reports closed-form theories of terrace lengths and nanorod diameter during the growth in mode I, as a function of deposition conditions. The accompanying lattice kinetic Monte Carlo simulations verify these theories. This study reveals that (1) quasi-steady growth exists for each set of nanorod growth conditions, and (2) the characteristic length scales, including terrace lengths and nanorod diameter at the quasi-steady state, depend on the deposition conditions – deposition rate F, substrate temperature T, and incidence angle θ – only as a function of l2D/tan θ, with l2D = 2($$\frac{v_{2D}}{F cos θ}$$)$$^\frac{1}{3}$$ as a diffusion-limited length scale and v2D as the atomic diffusion jump rate over monolayer surface steps.
Research Organization:
Northeastern University, Boston, MA (United States)
Sponsoring Organization:
USDOE; USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
SC0014035
OSTI ID:
1538867
Alternate ID(s):
OSTI ID: 1548536
Journal Information:
Surface Science, Journal Name: Surface Science Journal Issue: C Vol. 674; ISSN 0039-6028
Publisher:
ElsevierCopyright Statement
Country of Publication:
United States
Language:
English

References (23)

On the shape of wedding cakes journal May 1997
A Framework of Growing Crystalline Nanorods journal September 2012
Birth-death models of epitaxy journal June 1989
Four lectures on the physics of crystal growth journal October 2002
Closed-form theory of nuclei separation on highly anisotropic surfaces journal December 2016
Perspectives on oblique angle deposition of thin films: From fundamentals to devices journal March 2016
A generalized theory of thin film growth journal March 2018
Thin-film cliffhanger journal June 2002
Airtight metallic sealing at room temperature under small mechanical pressure journal October 2013
Schwoebel-Ehrlich barrier: from two to three dimensions journal May 2002
Engineering kinetic barriers in copper metallization journal December 2002
Step Motion on Crystal Surfaces journal September 1966
Atomic View of Surface Self‐Diffusion: Tungsten on Tungsten journal February 1966
An atomistic simulator for thin film deposition in three dimensions journal October 1998
Glancing angle deposition of sculptured thin metal films at room temperature journal September 2017
Island nucleation in the presence of step-edge barriers: Theory and applications journal May 2000
Smallest Metallic Nanorods Using Physical Vapor Deposition journal March 2013
Theory of adsorption and surfactant effect of Sb on Ag(111) journal October 1993
Critical island size for layer-by-layer growth journal January 1994
Surfactant-Mediated Growth Revisited journal September 2007
Generalized theory of smallest diameter of metallic nanorods journal August 2017
Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin films
  • Hawkeye, Matthew M.; Brett, Michael J.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 25, Issue 5, Article No. 1317 https://doi.org/10.1116/1.2764082
journal January 2007
Sculptured thin films and glancing angle deposition: Growth mechanics and applications
  • Robbie, K.; Brett, M. J.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 15, Issue 3, p. 1460-1465 https://doi.org/10.1116/1.580562
journal May 1997

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