Micropores and methods of making and using thereof

Perroud, Thomas D.; Patel, Kamlesh D.; Meagher, Robert J.

Title: Micropores and methods of making and using thereof

Patent · Tue Nov 19 00:00:00 EST 2013

OSTI ID:1531885

Perroud, Thomas D.; Patel, Kamlesh D.; Meagher, Robert J.

Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2× a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.

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Research Organization:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

Sponsoring Organization:: USDOE

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Number(s):: 8,585,916

Application Number:: 12/812,986

OSTI ID:: 1531885

Resource Relation:: Patent File Date: 2009-01-21

Country of Publication:: United States

Language:: English

References (55)

Microscale Electrochemical Cell And Methods Incorporating The Cell Arnold, Don W.; Jiang, Guifeng; Hebert, Nicole E. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080182136 US Patent Application 11/627877; 20080182136	patent-application	July 2008
Fabrication of ultra-shallow channels for microfluidic devices and systems Moon, James E.; Young, Lincoln C. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030178075 US Patent Application 10/366087; 20030178075	patent-application	September 2003
Particle packing of microdevice Yin, Hongfeng; Killeen, Kevin; Brennen, Reid A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7077175 US Patent Document 7,077,175	patent	July 2006
Adjustable nanopore, nanotome, and nanotweezer Barth, Philip W.; Roitman, Daniel B.; Myerson, Joel https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6706203 US Patent Document 6,706,203	patent	March 2004
Microfluidic devices comprising biochannels Blackburn, Gary https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050009101 US Patent Application 10/886408; 20050009101	patent-application	January 2005
Microfluidic flow control device Kornelsen, Kevin E. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020197167 US Patent Application 09/888648; 20020197167	patent-application	December 2002
Semiconductor device and method of fabricating the same Matsumoto, Takanori https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060014360 US Patent Application 11/180610; 20060014360	patent-application	January 2006
Continuous inertial focusing, ordering, and separation of particles in microchannels Di Carlo, D.; Irimia, D.; Tompkins, R. G. Proceedings of the National Academy of Sciences, Vol. 104, Issue 48, p. 18892-18897 https://doi.org/10.1073/pnas.0704958104	journal	November 2007
Microfluidic Device and Method of Using Same Li, Paul Chi Hang; Peng, Xing Yue https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080138848 US Patent Application 11/572134; 20080138848	patent-application	June 2008
Methods and compositions for selecting cells with increased potency Centanni, John M.; Allen-Hoffmann, Lynn https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060222635 US Patent Application 11/297916; 20060222635	patent-application	October 2006
Method and apparatus for separation of particles in a microfluidic device Pugia, Michael J.; Profitt, James A.; Schulman, Lloyd https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7094354 US Patent Document 7,094,354	patent	August 2006
Microfluidic system and methods of use Harrison, Daniel Jed; Andersson, Per-Erik; Li, Paul https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6632619 US Patent Document 6,632,619	patent	October 2003
Gravity-Driven Microfluidic Particle Sorting Device with Hydrodynamic Separation Amplification Huh, Dongeun; Bahng, Joong Hwan; Ling, Yibo Analytical Chemistry, Vol. 79, Issue 4 https://doi.org/10.1021/ac061542n	journal	February 2007
Polymorphic markers of the LSR gene Blumenfeld, Marta; Bougueleret, Lydie; Bihain, Bernard https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7125667 US Patent Document 7,125,667	patent	October 2006
Microfabrication process for enclosed microstructures Chong, John; Adams, Scott G.; MacDonald, Noel C. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6093330 US Patent Document 6,093,330	patent	July 2000
Microscale electrochemical cell and methods incorporating the cell Arnold, Don W.; Jiang, Guifeng; Herbert, Nicole F. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070170056 US Patent Application 11/341221; 20070170056	patent-application	July 2007
Method for sorting particles Wang, Mark; Tu, Eugene; O'Connell, James P. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6833542 US Patent Document 6,833,542	patent	December 2004
Chambers, systems, and methods for electrochemically processing microfeature workpieces Klocke, John L.; Hanson, Kyle M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7351315 US Patent Document 7,351,315	patent	April 2008
Microfluidic flow control device Kornelsen, Kevin https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6629820 US Patent Document 6,629,820	patent	October 2003
Composite Polymer Microfludic Control Device Rehm, Jason E.; Paul, Phillip H.; Cyr, Douglas R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070272309 US Patent Application 10/572181; 20070272309	patent-application	November 2007
Microfluidic system and methods of use Harrison, Daniel Jed; Andersson, Per-Erik; Li, Paul https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6900021 US Patent Document 6,900,021	patent	May 2005
Method and apparatus for sorting particles Bohm, Sebastian; Gilbert, John R.; Deshpande, Manish https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7157274 US Patent Document 7,157,274	patent	January 2007
Method and apparatus for exposing cells to different concentrations of analytes or drugs Yang, Mengsu; Li, Cheuk-Wing https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080020368 US Patent Application 11/489849; 20080020368	patent-application	January 2008
Fabrication of ultra-shallow channels for microfluidic devices and systems Moon, James E.; Young, Lincoln C. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7171975 US Patent Document 7,171,975	patent	February 2007
Processing of particles Arnoldd, Don W.; Rakestraw, David J.; Paul, Phillip H. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040235181 US Patent Application 10/849715; 20040235181	patent-application	November 2004
Microfluidic sorting of mammalian cells by optical force switching Wang, Mark M.; Tu, Eugene; Raymond, Daniel E. Nature Biotechnology, Vol. 23, Issue 1 https://doi.org/10.1038/nbt1050	journal	December 2004
Apparatus and method for trapping bead based reagents within microfluidic analysis systems Harrison, D. Jed; Oleschuk, Richard; Shultz-Lockyear, Loranelle https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7312611 US Patent Document 7,312,611	patent	December 2007
Apparatus and method for trapping bead based reagents within microfluidic analysis systems Harrison, D. Jed; Jemere, Abebaw Belay https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030217923 US Patent Application 10/153854; 20030217923	patent-application	November 2003
Apparatus and methods for electrochemical processing of microfeature wafers McHugh, Paul R.; Wilson, Gregory J.; Woodruff, Daniel J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080179180 US Patent Application 11/699768; 20080179180	patent-application	July 2008
Etch rates for micromachining processing-part II Williams, K.R.; Gupta, K.; Wasilik, M. Journal of Microelectromechanical Systems, Vol. 12, Issue 6, p. 761-778 https://doi.org/10.1109/JMEMS.2003.820936	journal	December 2003
Wet chemical processing chambers for processing microfeature workpieces Hanson, Kyle M.; Dolechek, Kert L.; McHugh, Paul R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050050767 US Patent Application 10/859748; 20050050767	patent-application	March 2005
Methods and apparatus for use of optical forces for identification, characterization and/or sorting of particles Wang, Mark M.; Tu, Eugene; Pestana, Luis M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060060767 US Patent Application 11/272593; 20060060767	patent-application	March 2006
Integrated system with modular microfluidic components Jovanovich, Stevan B.; Blaga, Iuliu Ioan; McIntosh, Roger https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7244961 US Patent Document 7,244,961	patent	July 2007
Particulate processing system Rakestraw, David J.; Arnold, Don W.; Paul, Phillip H. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7220592 US Patent Document 7,220,592	patent	May 2007
Microfluidic devices comprising biochannels Blackburn, Gary https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6875619 US Patent Document 6,875,619	patent	April 2005
Microfluidic cell analysis and sorting using photonic forces Tu, Eugene; Zhang, Haichuan; Wang, Mark M. Optical Science and Technology, the SPIE 49th Annual Meeting, SPIE Proceedings https://doi.org/10.1117/12.584724	conference	October 2004
A high-discernment microflow cytometer with microweir structure Fu, Lung-Ming; Tsai, Chien-Hsiung; Lin, Che-Hsin ELECTROPHORESIS, Vol. 29, Issue 9 https://doi.org/10.1002/elps.200700630	journal	May 2008
Apparatus and method for trapping bead based reagents within microfluidic analysis systems Harrison, D. Jed; Oleschuk, Richard; Shultz-Lockyear, Loranelle https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6432290 US Patent Document 6,432,290	patent	August 2002
Method and apparatus for entry and storage of specimens into a microfluidic devic Pugia, Michael J.; Profit, James A.; Blankenstein, Gert https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040265172 US Patent Application 10/608671; 20040265172	patent-application	December 2004
A trap-and-release integrated microfluidic system for dynamic microarray applications Tan, W.-H.; Takeuchi, S. Proceedings of the National Academy of Sciences, Vol. 104, Issue 4, p. 1146-1151 https://doi.org/10.1073/pnas.0606625104	journal	January 2007
Microfluidic devices Jovanovich, Stevan Bogdan; Blaga, Iuliu Ioan; Rank, David https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070248958 US Patent Application 11/229065; 20070248958	patent-application	October 2007
Heteroduplex tracking assay Philpott, Sean; Weiser, Barbara; Burger, Harold https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080020370 US Patent Application 11/654897; 20080020370	patent-application	January 2008
Dynamic Cell and Microparticle Control via Optoelectronic Tweezers Ohta, Aaron Takami; Chiou, Pei-Yu; Han, Tae H. Journal of Microelectromechanical Systems, Vol. 16, Issue 3 https://doi.org/10.1109/JMEMS.2007.896717	journal	June 2007
Microfluidic Devices Jovanovich, Stevan B.; Blaga, Inliu I.; Rank, David https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080014576 US Patent Application 11/670866; 20080014576	patent-application	January 2008
Device and method for contacting picoliter volumes of fluid Irimia, Daniel; Toner, Mehmet https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070099289 US Patent Application 10/560661; 20070099289	patent-application	May 2007
Composite polymer microfluidic control device Rehm, Jason E.; Paul, Phillip H.; Cyr, Douglas R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7296592 US Patent Document 7,296,592	patent	November 2007
Methods and Apparatus for the Manipulation of Particle Suspensions and Testing Thereof Ionescu-Zanetti, Cristian; Khine, Michelle; Schwartz, Michael https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070243523 US Patent Application 11/690831; 20070243523	patent-application	October 2007
Fluid control structures in microfluidic devices Mathies, Richard A.; Grover, William H.; Paegel, Brian https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040209354 US Patent Application 10/750533; 20040209354	patent-application	October 2004
Particle packing of microdevice Yin, Hongfeng; Killeen, Kevin P.; Brennen, Reid A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050224134 US Patent Application 10/821543; 20050224134	patent-application	October 2005
Microfluidic system and methods of use Harrison, Daniel Jed; Li, Paul C. H.; Szarka, Roderick https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040178071 US Patent Application 10/637689; 20040178071	patent-application	September 2004
Method for etching vertical contact holes without substrate damage caused by directional etching Cronin, John; Potter, Michael D.; Starkey, Jr., Gorden Seth https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5654238 US Patent Document 5,654,238	patent	August 1997
Electrokinetically driven micro flow cytometers with integrated fiber optics for on-line cell/particle detection Fu, Lung-Ming; Yang, Ruey-Jen; Lin, Che-Hsin Analytica Chimica Acta, Vol. 507, Issue 1, p. 163-169 https://doi.org/10.1016/j.aca.2003.10.028	journal	April 2004
Hydrodynamic Focusing and Electronic Cell-Sizing Techniques Shuler, M. L.; Aris, R.; Tsuchiya, H. M. Applied Microbiology, Vol. 24, Issue 3 https://doi.org/10.1128/am.24.3.384-388.1972	journal	September 1972
Efficient compound distribution in microfluidic devices Boone, Travis https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6824663 US Patent Document 6,824,663	patent	November 2004
Methods and apparatus for sorting cells using an optical switch in a microfluidic channel network Butler, William Frank; Chachisvilis, Mirianas; Dees, Robert https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20050207940 US Patent Application 10/928650; 20050207940	patent-application	September 2005

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Micropores and methods of making and using thereof Perroud, Thomas D.; Patel, Kamlesh D.; Meagher, Robert https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9404913 US Patent Document 9,404,913	patent	August 2016

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