Micropores and methods of making and using thereof

Perroud, Thomas D.; Patel, Kamlesh D.; Meagher, Robert J.

Micropores and methods of making and using thereof

Patent · Tue Aug 02 04:00:00 EDT 2016

OSTI ID:1280743

Perroud, Thomas D.; Patel, Kamlesh D.; Meagher, Robert J.

Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Number(s):: 9,404,913

Application Number:: 14/057,170

OSTI ID:: 1280743

Country of Publication:: United States

Language:: English

References (10)

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Etch rates for micromachining processing-part II Williams, K.R.; Gupta, K.; Wasilik, M. Journal of Microelectromechanical Systems, Vol. 12, Issue 6, p. 761-778 https://doi.org/10.1109/JMEMS.2003.820936	journal	December 2003
A high-discernment microflow cytometer with microweir structure Fu, Lung-Ming; Tsai, Chien-Hsiung; Lin, Che-Hsin ELECTROPHORESIS, Vol. 29, Issue 9 https://doi.org/10.1002/elps.200700630	journal	May 2008
Gravity-Driven Microfluidic Particle Sorting Device with Hydrodynamic Separation Amplification Huh, Dongeun; Bahng, Joong Hwan; Ling, Yibo Analytical Chemistry, Vol. 79, Issue 4 https://doi.org/10.1021/ac061542n	journal	February 2007
Electrokinetically driven micro flow cytometers with integrated fiber optics for on-line cell/particle detection Fu, Lung-Ming; Yang, Ruey-Jen; Lin, Che-Hsin Analytica Chimica Acta, Vol. 507, Issue 1, p. 163-169 https://doi.org/10.1016/j.aca.2003.10.028	journal	April 2004
Dynamic Cell and Microparticle Control via Optoelectronic Tweezers Ohta, Aaron Takami; Chiou, Pei-Yu; Han, Tae H. Journal of Microelectromechanical Systems, Vol. 16, Issue 3 https://doi.org/10.1109/JMEMS.2007.896717	journal	June 2007
Isotropically etched radial micropore for cell concentration, immobilization, and picodroplet generation Perroud, Thomas D.; Meagher, Robert J.; Kanouff, Michael P. Lab on a Chip, Vol. 9, Issue 4, p. 507-515 https://doi.org/10.1039/B817285D	journal	January 2009
A trap-and-release integrated microfluidic system for dynamic microarray applications Tan, W.-H.; Takeuchi, S. Proceedings of the National Academy of Sciences, Vol. 104, Issue 4, p. 1146-1151 https://doi.org/10.1073/pnas.0606625104	journal	January 2007
Microfluidic cell analysis and sorting using photonic forces Tu, Eugene; Zhang, Haichuan; Wang, Mark M. Optical Science and Technology, the SPIE 49th Annual Meeting, SPIE Proceedings https://doi.org/10.1117/12.584724	conference	October 2004

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