Micropores and methods of making and using thereof

Perroud, Thomas D.; Patel, Kamlesh D.; Meagher, Robert J.

Title: Micropores and methods of making and using thereof

Patent · Tue Aug 02 00:00:00 EDT 2016

OSTI ID:1280743

Perroud, Thomas D.; Patel, Kamlesh D.; Meagher, Robert J.

Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Number(s):: 9,404,913

Application Number:: 14/057,170

OSTI ID:: 1280743

Resource Relation:: Patent File Date: 2013 Oct 18

Country of Publication:: United States

Language:: English

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