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Growth of InSb on GaAs Substrates Using InAlSb Buffers for Magnetic Field Sensor Applications

Conference ·
OSTI ID:15203

We report the growth of InSb on GaAs using InAlSb buffers of high interest for magnetic field sensors. We have grown samples by metal-organic chemical vapor deposition consisting of {approx}0.55{micro}m thick InSb layers with resistive InAlSb buffers on GaAs substrates with measured electron mobilities of {approx}40,000 cm{sup 2}/V.s. We have investigated the In{sub 1-x}Al{sub x}Sb buffers for compositions x {le} 0.22 and have found that the best results are obtained near x = 0.12 due to the tradeoff of buffer layer bandgap and lattice mismatch.

Research Organization:
Sandia National Labs., Albuquerque, NM (US); Sandia National Labs., Livermore, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
15203
Report Number(s):
SAND99-2020C
Country of Publication:
United States
Language:
English

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