Two-channel wakeup system employing aluminum nitride based MEMS resonant accelerometers for near-zero power applications.
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- Darpa Funded. These are results from NZERO. Permission to submit was given.
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1511538
- Report Number(s):
- SAND2018-4144C; 662767
- Country of Publication:
- United States
- Language:
- English
Similar Records
Near-Zero Power Accelerometer Wakeup System.
Aluminum Nitride Enabled MEMS for Near-Zero Power Wakeup and High Temperature Capable Sensing.
Piezoelectric MEMS Based on Aluminum Nitride.
Conference
·
Sun Oct 01 00:00:00 EDT 2017
·
OSTI ID:1480391
Aluminum Nitride Enabled MEMS for Near-Zero Power Wakeup and High Temperature Capable Sensing.
Conference
·
Mon Oct 01 00:00:00 EDT 2018
·
OSTI ID:1593601
Piezoelectric MEMS Based on Aluminum Nitride.
Conference
·
Wed Dec 31 23:00:00 EST 2014
·
OSTI ID:1244916