Thin film nanocalorimeter for heat capacity measurements of 30 nm films

Queen, D. R.; Hellman, F.

doi:10.1063/1.3142463

Thin film nanocalorimeter for heat capacity measurements of 30 nm films

Journal Article · Mon Jun 01 00:00:00 EDT 2009 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.3142463· OSTI ID:1511313

Queen, D. R. ^[1]; Hellman, F. ^[1]

Univ. of California, Berkeley, CA (United States). Dept. of Physics

A silicon nitride membrane-based nanocalorimeter is described for measuring the heat capacity of 30 nm films from 300 mK to 800 K and in high magnetic fields with absolute accuracy ∼2%. The addenda heat capacity of the nanocalorimeter is less than 2 × 10^-7 J/K at room temperature and 2 × 10^-10 J/K at 2.3 K. This is more than ten times smaller than any existing calorimeter suitable for measuring thin films over this wide temperature range. The heat capacities of thin Cu and Au films are reported and agree with bulk values. The thermal conductivity of the thin low stress silicon nitride is substantially smaller than thicker membranes while the specific heat is enhanced below 20 K. Lastly, design of the nanocalorimeter will be discussed along with fabrication details and calibration results.

View Accepted Manuscript (DOE)

Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1511313

Journal Information:: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 6 Vol. 80; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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