Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides

Chen, Christopher T.; Pedrini, Jacopo; Gaulding, E. Ashley; Kastl, Christoph; Calafiore, Giuseppe; Dhuey, Scott; Kuykendall, Tevye R.; Cabrini, Stefano; Toma, Francesca M.; Aloni, Shaul; Schwartzberg, Adam M.

doi:10.1038/s41598-019-39115-3

Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides

Journal Article · Tue Feb 26 00:00:00 EST 2019 · Scientific Reports

DOI:https://doi.org/10.1038/s41598-019-39115-3· OSTI ID:1503660

^[1]; Pedrini, Jacopo ^[2]; Gaulding, E. Ashley ^[1]; Kastl, Christoph ^[1]; Calafiore, Giuseppe ^[1]; Dhuey, Scott ^[1]; Kuykendall, Tevye R. ^[1]; Cabrini, Stefano ^[1]; ^[1]; Aloni, Shaul ^[1]; Schwartzberg, Adam M. ^[1]

Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Univ. degli Studi di Milano-Bicocca, Milano (Italy)

Materials for nanophotonic devices ideally combine ease of deposition, very high refractive index, and facile pattern formation through lithographic templating and/or etching. In this work, we present a scalable method for producing high refractive index WS₂ layers by chemical conversion of WO₃ synthesized via atomic layer deposition (ALD). These conformal nanocrystalline thin films demonstrate a surprisingly high index of refraction (n > 3.9), and structural fidelity compatible with lithographically defined features down to ~10 nm. Although this process yields highly polycrystalline films, the optical constants are in agreement with those reported for single crystal bulk WS₂. Subsequently, we demonstrate three photonic structures - first, a two-dimensional hole array made possible by patterning and etching an ALD WO₃ thin film before conversion, second, an analogue of the 2D hole array first patterned into fused silica before conformal coating and conversion, and third, a three-dimensional inverse opal photonic crystal made by conformal coating of a self-assembled polystyrene bead template. Furthermore these results can be trivially extended to other transition metal dichalcogenides, thus opening new opportunities for photonic devices based on high refractive index materials.

View Accepted Manuscript (DOE)

Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Scientific User Facilities Division

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1503660

Journal Information:: Scientific Reports, Journal Name: Scientific Reports Journal Issue: 1 Vol. 9; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

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