Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides

Chen, Christopher T.; Pedrini, Jacopo; Gaulding, E. Ashley; Kastl, Christoph; Calafiore, Giuseppe; Dhuey, Scott; Kuykendall, Tevye R.; Cabrini, Stefano; Toma, Francesca M.; Aloni, Shaul; Schwartzberg, Adam M.

doi:10.1038/s41598-019-39115-3

Title: Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides

Journal Article · Tue Feb 26 00:00:00 EST 2019 · Scientific Reports

DOI:https://doi.org/10.1038/s41598-019-39115-3· OSTI ID:1503660

^[1]; Pedrini, Jacopo ^[2]; Gaulding, E. Ashley ^[1]; Kastl, Christoph ^[1]; Calafiore, Giuseppe ^[1]; Dhuey, Scott ^[1]; Kuykendall, Tevye R. ^[1]; Cabrini, Stefano ^[1];

^[1]; Aloni, Shaul ^[1]; Schwartzberg, Adam M. ^[1]

Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Univ. degli Studi di Milano-Bicocca, Milano (Italy)

Materials for nanophotonic devices ideally combine ease of deposition, very high refractive index, and facile pattern formation through lithographic templating and/or etching. In this work, we present a scalable method for producing high refractive index WS₂ layers by chemical conversion of WO₃ synthesized via atomic layer deposition (ALD). These conformal nanocrystalline thin films demonstrate a surprisingly high index of refraction (n > 3.9), and structural fidelity compatible with lithographically defined features down to ~10 nm. Although this process yields highly polycrystalline films, the optical constants are in agreement with those reported for single crystal bulk WS₂. Subsequently, we demonstrate three photonic structures - first, a two-dimensional hole array made possible by patterning and etching an ALD WO₃ thin film before conversion, second, an analogue of the 2D hole array first patterned into fused silica before conformal coating and conversion, and third, a three-dimensional inverse opal photonic crystal made by conformal coating of a self-assembled polystyrene bead template. Furthermore these results can be trivially extended to other transition metal dichalcogenides, thus opening new opportunities for photonic devices based on high refractive index materials.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1503660

Journal Information:: Scientific Reports, Vol. 9, Issue 1; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 9 works

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