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Fabrication of grids and collimators using SU-8 as a mold

Journal Article · · Microsystem Technologies
Abstract not provided
Research Organization:
Advanced Photon Source (APS), Argonne National Laboratory (ANL), Argonne, IL (US); Creatv MicroTech, Inc.
Sponsoring Organization:
USDOE
DOE Contract Number:
W-31109-ENG-38
OSTI ID:
15020491
Journal Information:
Microsystem Technologies, Journal Name: Microsystem Technologies Journal Issue: 6-7 Vol. 10; ISSN 0946-7076
Publisher:
Springer
Country of Publication:
United States
Language:
English

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