Fabrication of grids and collimators using SU-8 as a mold
Journal Article
·
· Microsystem Technologies
Abstract not provided
- Research Organization:
- Advanced Photon Source (APS), Argonne National Laboratory (ANL), Argonne, IL (US); Creatv MicroTech, Inc.
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 15020491
- Journal Information:
- Microsystem Technologies, Journal Name: Microsystem Technologies Journal Issue: 6-7 Vol. 10; ISSN 0946-7076
- Publisher:
- Springer
- Country of Publication:
- United States
- Language:
- English
Similar Records
Fabrication of focused two-dimensional grids
Fabrication of collimating grids for an x-ray solar telescope using LIGA methods
Fabricating sub-collimating grids for an x-ray solar imaging spectrometer using LIGA techniques
Journal Article
·
Fri Oct 01 00:00:00 EDT 2004
· Microsystem Technologies
·
OSTI ID:15020985
Fabrication of collimating grids for an x-ray solar telescope using LIGA methods
Journal Article
·
Thu May 01 00:00:00 EDT 1997
· Microsystem Technologies
·
OSTI ID:794661
Fabricating sub-collimating grids for an x-ray solar imaging spectrometer using LIGA techniques
Conference
·
Sun Oct 01 00:00:00 EDT 1995
·
OSTI ID:794663