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Fabrication of collimating grids for an x-ray solar telescope using LIGA methods

Journal Article · · Microsystem Technologies

No abstract prepared.

Research Organization:
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
794661
Report Number(s):
LBNL/ALS--264
Journal Information:
Microsystem Technologies, Journal Name: Microsystem Technologies Journal Issue: 3 Vol. 3
Country of Publication:
United States
Language:
English

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