Stress-Induced Nitrogen and Oxygen Segregation and Complexing Investigated by High Resolution Synchrotron FTIR: Preprint
Nitrogen doped Czochralski (N-CZ) and Float Zone (N-FZ) silicon were measured by high resolution synchrotron Fourier Transform IR spectroscopy (HR-FTIR). The chemical complexes were analyzed in specific regions with known extended defects, i.e., denuded or precipitated regions of annealed N-CZ Si wafers, in N-FZ Si with ring defects and on ''N-Skin'' region. The absorption lines were assigned to chemical complexes previously studied by first principles calculations. In annealed N-CZ Si wafers, a strong correlation was observed between the absorption line intensity depth variations and the defect distributions revealed by an Oxygen Precipitate Profiler (OPP), and oxygen and nitrogen SIMS profiles. Transformation of chemical complexes from one type to another was observed. A defect band, visible as an OPP peak at the denuded zone-bulk interface was found to be related to vacancy defect enhancement of oxygen precipitation via production of mobile N2. For the as grown N-FZ, the radial dependency of IR absorption line intensity is correlated to x-ray topography contrast.
- Research Organization:
- National Renewable Energy Lab., Golden, CO (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC36-99-GO10337
- OSTI ID:
- 15009896
- Report Number(s):
- NREL/CP-520-36751; TRN: US0406702
- Resource Relation:
- Conference: Prepared for the 14th Workshop on Crystalline Silicon Solar Cells and Modules, Winter Park, CO (US), 08/08/2004--08/11/2004; Other Information: PBD: 1 Aug 2004
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
43 PARTICLE ACCELERATORS
ABSORPTION
DEFECTS
NITROGEN
OXYGEN
PRECIPITATION
PRODUCTION
RESOLUTION
SEGREGATION
SILICON
SILICON SOLAR CELLS
SPECTROSCOPY
SYNCHROTRONS
TOPOGRAPHY
TRANSFORMATIONS
IMPURITIES
CRYSTAL GROWTH
PASSIVATION
MICROELECTRONICS
PV
PHOTOVOLTAICS
SOLAR CELLS
CRYSTALLINE SILICON
MATERIALS AND PROCESSES
MODULE
DEVICE PROCESS
DEFECT
SOLAR ENERGY - PHOTOVOLTAICS