ELECTRONIC STRUCTURE OF THIN FILM SILICON OXYNITRIDES MEASURED USING SOFT X-RAY EMISSION AND ABSORPTION
Journal Article
·
· Journal of Applied Physics
No abstract prepared.
- Research Organization:
- Brookhaven National Laboratory, National Synchrotron Light Source (US)
- Sponsoring Organization:
- DOE/OFFICE OF SCIENCE (US)
- DOE Contract Number:
- AC02-98CH10886
- OSTI ID:
- 15008408
- Report Number(s):
- BNL-72557-2004-JA; TRN: US200426%%465
- Journal Information:
- Journal of Applied Physics, Vol. 94, Issue 6; Other Information: PBD: 1 Jan 2003
- Country of Publication:
- United States
- Language:
- English
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