Crystallization of electrically conductive visibly transparent ITO thin films by wavelength-range-specific pulsed Xe arc lamp annealing

Plumley, John Bryan; Cook, Adam W.; Larsen, Christopher A.; Artyushkova, Kateryna; Han, Sang M.; Peng, Thomas L.; Kemp, Richard A.

doi:10.1007/s10853-018-2534-7

Crystallization of electrically conductive visibly transparent ITO thin films by wavelength-range-specific pulsed Xe arc lamp annealing

Journal Article · Fri Jun 08 00:00:00 EDT 2018 · Journal of Materials Science

DOI:https://doi.org/10.1007/s10853-018-2534-7· OSTI ID:1482732

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Univ. of New Mexico, Albuquerque, NM (United States)
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Kirtland Air Force Base, Albuquerque, NM (United States)
Univ. of New Mexico, Albuquerque, NM (United States); Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Here, the transparent electric conductors made of indium tin oxide (ITO)-doped glass prepared by a flash lamp annealing (FLA) process were compared with ITO-doped glass prepared via a conventional rapid thermal annealing (RTA) process. Stylus surface profilometry was used to determine thicknesses, scanning electron microscopy was used to image surfaces, X-ray diffraction was used to determine film structures, X-ray photoelectron spectroscopy was used to determine oxidation states and film compositions, 4-point probe measurements were used to determine electrical conductivities, UV–Vis spectroscopy was used to determine film transparencies, and selective light filtering was used to determine which wavelengths of light are needed to anneal ITO into a visibly transparent electrically conductive thin film via an FLA process. The results showed that FLA with visible light can be used to nearly instantaneously anneal ITO to create visibly transparent and electrically conductive ITO thin films on glass. The FLA process achieved this by predominately exciting unoxidized indium, unoxidized tin, tin monoxide (SnO), and non-stoichiometric indium oxide (InO x ), appropriately distributed in an electron beam physical vapor-deposited amorphous ITO thin film, to allow their oxidation and crystallization into an electrically conductive visibly transparent ITO. Though it is possible to prepare ITO-doped glass that is more transparent with an RTA process, the FLA process is significantly faster, has comparable electrical conductivity, and can strongly localize heating to areas of the as-deposited ITO thin film that are not electrically conductive and visibly transparent.

View Accepted Manuscript (DOE)

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1482732

Alternate ID(s):: OSTI ID: 22754170

Report Number(s):: SAND--2018-12167J; 669073

Journal Information:: Journal of Materials Science, Journal Name: Journal of Materials Science Journal Issue: 18 Vol. 53; ISSN 0022-2461

Publisher:: SpringerCopyright Statement

Country of Publication:: United States

Language:: English

References (19)

Emerging Transparent Electrodes Based on Thin Films of Carbon Nanotubes, Graphene, and Metallic Nanostructures Hecht, David S.; Hu, Liangbing; Irvin, Glen Advanced Materials, Vol. 23, Issue 13, p. 1482-1513 https://doi.org/10.1002/adma.201003188	journal	February 2011
Flash Lamp Annealing of ITO thin films on ultra-thin glass: Improvement of the electrical and optical properties Weller, Stephanie; Junghähnel, Manuela Vakuum in Forschung und Praxis, Vol. 27, Issue 4 https://doi.org/10.1002/vipr.201500586	journal	August 2015
Convenient preparation of ITO nanoparticles inks for transparent conductive thin films Ito, Daisuke; Masuko, Keiichiro; Weintraub, Benjamin A. Journal of Nanoparticle Research, Vol. 14, Issue 12 https://doi.org/10.1007/s11051-012-1274-x	journal	November 2012
Electrical and optical properties of indium-tin oxide (ITO) films by ion-assisted deposition (IAD) at room temperature Farhan, Mansour S.; Zalnezhad, Erfan; Bushroa, Abdul Razak International Journal of Precision Engineering and Manufacturing, Vol. 14, Issue 8 https://doi.org/10.1007/s12541-013-0197-5	journal	August 2013
Transparent conducting, anti-static and anti-static–anti-glare coatings on plastic substrates Al-Dahoudi, N.; Bisht, H.; Göbbert, C. Thin Solid Films, Vol. 392, Issue 2 https://doi.org/10.1016/S0040-6090(01)01047-1	journal	July 2001
Effect of nitrogen incorporation on the structural, optical and dielectric properties of reactive sputter grown ITO films Gartner, M.; Stroescu, H.; Marin, A. Applied Surface Science, Vol. 313 https://doi.org/10.1016/j.apsusc.2014.05.208	journal	September 2014
Spectroscopic ellipsometry investigation on the excimer laser annealed indium thin oxide sol–gel films Noh, Miru; Seo, Ilwan; Park, Junghyun Current Applied Physics, Vol. 16, Issue 2 https://doi.org/10.1016/j.cap.2015.11.007	journal	February 2016
Xe-arc flash annealing of indium tin oxide thin-films prepared on glass backplanes Kim, Yoonsuk; Park, Seungho; Kim, Byung-Kuk International Journal of Heat and Mass Transfer, Vol. 91 https://doi.org/10.1016/j.ijheatmasstransfer.2015.07.132	journal	December 2015
Influence of precursor nature on the thermal growth of Tin–Indium oxide layers by MOCVD Szkutnik, P. D.; Rapenne, L.; Roussel, H. Surface and Coatings Technology, Vol. 230 https://doi.org/10.1016/j.surfcoat.2013.06.063	journal	September 2013
Comparing Multiple Exciton Generation in Quantum Dots To Impact Ionization in Bulk Semiconductors: Implications for Enhancement of Solar Energy Conversion Beard, Matthew C.; Midgett, Aaron G.; Hanna, Mark C. Nano Letters, Vol. 10, Issue 8 https://doi.org/10.1021/nl101490z	journal	August 2010
Non-radiative relaxation of photoexcited chlorophylls: theoretical and experimental study Bricker, William P.; Shenai, Prathamesh M.; Ghosh, Avishek Scientific Reports, Vol. 5, Issue 1 https://doi.org/10.1038/srep13625	journal	September 2015
Tin oxide with a p–n heterojunction ensures both UV and visible light photocatalytic activity Sinha, Arun Kumar; Manna, P. K.; Pradhan, Mukul RSC Adv., Vol. 4, Issue 1 https://doi.org/10.1039/C3RA42740D	journal	January 2014
The fabrication of In ₂ O ₃ /In ₂ S ₃ /Ag nanocubes for efficient photoelectrochemical water splitting Xu, Rui; Li, Haohua; Zhang, Wenwen Physical Chemistry Chemical Physics, Vol. 18, Issue 4 https://doi.org/10.1039/C5CP05833C	journal	January 2016
Basic materials physics of transparent conducting oxides Edwards, P. P.; Porch, A.; Jones, M. O. Dalton Transactions, Issue 19 https://doi.org/10.1039/b408864f	journal	January 2004
Ultrasensitive visible light photoresponse and electrical transportation properties of nonstoichiometric indium oxide nanowire arrays by electrospinning Huang, Siya; Ou, Gang; Cheng, Jing Journal of Materials Chemistry C, Vol. 1, Issue 39 https://doi.org/10.1039/c3tc31051e	journal	January 2013
Electrical, optical, and structural properties of indium–tin–oxide thin films for organic light-emitting devices Kim, H.; Gilmore, C. M.; Piqué, A. Journal of Applied Physics, Vol. 86, Issue 11 https://doi.org/10.1063/1.371708	journal	December 1999
Ammonia Sensing Characteristics of Sputtered Indium Tin Oxide (ITO) Thin Films on Quartz and Sapphire Substrates Lin, Cheng-Wei; Chen, Huey-Ing; Chen, Tai-You IEEE Transactions on Electron Devices, Vol. 58, Issue 12 https://doi.org/10.1109/TED.2011.2167234	journal	December 2011
X‐ray photoelectron spectroscopy investigation of ion beam sputtered indium tin oxide films as a function of oxygen pressure during deposition Nelson, A. J.; Aharoni, H. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 5, Issue 2 https://doi.org/10.1116/1.574109	journal	March 1987
Transparent Conducting Oxides for Photovoltaics Fortunato, Elvira; Ginley, David; Hosono, Hideo MRS Bulletin, Vol. 32, Issue 03, p. 242-247 https://doi.org/10.1557/mrs2007.29	journal	March 2007

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