Polarization and efficiency of a concave multilayer grating in the 135--250-A region and in normal-incidence and Seya--Namioka mounts
- SFA Inc., 1401 McCormick Drive, Landover, Maryland 20785 (United States)
- Lawrence Livermore National Laboratory, Livermore, California 94550 (United States)
- Topometrix Corporation, Bedminster, New Jersey 07921 (United States)
- Analytical Answers Inc., 4 Arrow Drive, Woburn, Massachusetts (United States)
- Naval Research Laboratory, 01801, 4555 Overlook Avenue, S.W., Washington, D.C. 20375 (United States)
A molybdenum/silicon multilayer coating was applied to a holographic ion-etched blazed grating substrate that had 2400 grooves/mm and a radius of curvature of 2.2 m. Scanning probe microscopy yielded the same surface microroughness (5 A rms) before and after deposition of the multilayer. The efficiency and polarization performance of the grating was measured by synchrotron radiation in the 135--250-A wavelength region. In the second grating order and the second Bragg order of the multilayer coating, the peak normal-incidence efficiency was 7.5% at a wavelength of 147 A, representing a groove efficiency of 27%. At an angle of incidence of 35{degree}, the polarization performance of the grating was 95%--100% in the 210--250-A wavelength region. In a Seya--Namioka spectrometer mount at an angle of incidence of 30{degree}--40{degree}, the grating is a nearly perfect polarizing optical element in the wavelength bands between 125 and 300 A, which are covered by the multilayer coating. {copyright} {ital 1995} {ital Optical} {ital Society} {ital of} {ital America}.
- Research Organization:
- Brookhaven National Laboratory
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 147756
- Journal Information:
- Applied Optics, Journal Name: Applied Optics Journal Issue: 31 Vol. 34; ISSN 0003-6935; ISSN APOPAI
- Country of Publication:
- United States
- Language:
- English
Similar Records
Grazing-incidence efficiencies in the 28{endash}42-{Angstrom} wavelength region of replicas of the Skylab 3600-line/mm concave grating with multilayer and gold coatings
Record High Extreme-Ultraviolet Efficiency at Near-Normal Incidence from a Multilayer-Coated Polymer Over-coated Blazed Ion-Etched Holographic Grating