Reproducible growth and application of AlAs/GaAs double barrier resonant tunneling diodes
Journal Article
·
· Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
- Hewlett-Packard Lab., Palo Alto, CA (United States); and others
More than 15 AlAs/GaAs double barrier resonant tunneling diode wafers of nominally identical structure were grown and excellent reproducibility in the I-V characteristics was found. The peak current density varied by less than 10% within a wafer and less than 20% from wafer to wafer. A variation of 20% in the peak current density corresponds to an average variation of 0.3 monolayers in the thickness of the AlAs barriers. An internal switching time of 6 ps was measured using electro-optic sampling and a circuit using these devices operated at more than 50 GHz. 8 refs., 3 figs., 2 tabs.
- OSTI ID:
- 147055
- Report Number(s):
- CONF-9210296-; ISSN 0734-211X; TRN: 95:007540-0063
- Journal Information:
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Vol. 11, Issue 3; Conference: North American conference on molecular beam epitaxy, Ontario (Canada), 12-14 Oct 1992; Other Information: PBD: May-Jun 1993
- Country of Publication:
- United States
- Language:
- English
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