Surface-Enhanced Infrared Absorption: Pushing the Frontier for On-Chip Gas Sensing

Chong, Xinyuan; Zhang, Yujing; Li, Erwen; Kim, Ki-Joong; Ohodnicki, Paul R.; Chang, Chih-hung; Wang, Alan X.

doi:10.1021/acssensors.7b00891

Surface-Enhanced Infrared Absorption: Pushing the Frontier for On-Chip Gas Sensing

Journal Article · Tue Dec 19 00:00:00 EST 2017 · ACS Sensors

DOI:https://doi.org/10.1021/acssensors.7b00891· OSTI ID:1461083

Chong, Xinyuan ^[1]; Zhang, Yujing ^[2]; Li, Erwen ^[1]; Kim, Ki-Joong ^[3]; Ohodnicki, Paul R. ^[4]; Chang, Chih-hung ^[2]; ^[1]

Oregon State Univ., Corvallis, OR (United States). School of Electrical Engineering and Computer Science
Oregon State Univ., Corvallis, OR (United States). School of Chemical, Biological and Environmental Engineering
National Energy Technology Lab. (NETL), Pittsburgh, PA (United States); AECOM, South Park, PA (United States)
National Energy Technology Lab. (NETL), Pittsburgh, PA (United States); Carnegie Mellon Univ., Pittsburgh, PA (United States). Materials Science and Engineering Dept.

Surface-enhanced infrared absorption (SEIRA) is capable of identifying molecular fingerprints by resonant detection of infrared vibrational modes through the coupling with plasmonic modes of metallic nanostructures. However, SEIRA for on-chip gas sensing is still not very successful due to the intrinsically weak light-matter interaction between photons and gas molecules and the technical challenges in accumulating sufficient gas species in the vicinity of the spatially localized enhanced electric field, namely, the “hot-spots”, generated through plasmonics. In this paper, we present a suspended silicon nitride (Si₃N₄) nanomembrane device by integrating plasmonic nanopatch gold antennas with metal–organic framework (MOF), which can largely adsorb carbon dioxide (CO₂) through its nanoporous structure. Unlike conventional SEIRA sensing relying on highly localized hot-spots of plasmonic nanoantennas or nanoparticles, the device reported in this article engineered the coupled surface plasmon polaritons in the metal–Si₃N₄ and metal–MOF interfaces to achieve strong optical field enhancement across the entire MOF film. Lastly, we successfully demonstrated on-chip gas sensing of CO₂ with more than 1800× enhancement factors by combining the concentration effect from the 2.7 μm MOF thin film and the optical field enhancement of the plasmonic nanopatch antennas.

View Accepted Manuscript (DOE)

Research Organization:: National Energy Technology Laboratory (NETL), Pittsburgh, PA, and Morgantown, WV (United States)

Sponsoring Organization:: National Science Foundation (NSF); USDOE Office of Fossil Energy (FE)

OSTI ID:: 1461083

Journal Information:: ACS Sensors, Journal Name: ACS Sensors Journal Issue: 1 Vol. 3; ISSN 2379-3694

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

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47 OTHER INSTRUMENTATION
gas sensor
metal−organic framework
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plasmonic nanostructure
surface-enhanced infrared absorption

Surface-Enhanced Infrared Absorption: Pushing the Frontier for On-Chip Gas Sensing

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References (45)

Cited By (2)

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