Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition

Lewis, Brett B.; Mound, Brittnee A.; Srijanto, Bernadeta; Fowlkes, Jason Davidson; Pharr, George Mathews; Rack, Philip D.

doi:10.1039/c7nr05274j

Title: Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition

Journal Article · Thu Oct 12 00:00:00 EDT 2017 · Nanoscale

DOI:https://doi.org/10.1039/c7nr05274j· OSTI ID:1440834

^[1];

^[2];

^[3]; Pharr, George Mathews ^[4];

^[3]

Univ. of Tennessee, Knoxville, TN (United States)
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Univ. of Tennessee, Knoxville, TN (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Univ. of Tennessee, Knoxville, TN (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Texas A & M Univ., College Station, TX (United States)

Here, nanomechanical measurements of platinum–carbon 3D nanoscale architectures grown via focused electron beam induced deposition (FEBID) were performed using a nanoindentation system in a scanning electron microscope (SEM) for simultaneous in situ imaging.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1440834

Journal Information:: Nanoscale, Vol. 9, Issue 42; ISSN 2040-3364

Publisher:: Royal Society of ChemistryCopyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 23 works

Citation information provided by
Web of Science

References (48)

Quantitative in situ nanoindentation in an electron microscope Minor, A. M.; Morris, J. W.; Stach, E. A. Applied Physics Letters, Vol. 79, Issue 11 https://doi.org/10.1063/1.1400768	journal	September 2001
High-resolution magnetic Co supertips grown by a focused electron beam Utke, I.; Hoffmann, P.; Berger, R. Applied Physics Letters, Vol. 80, Issue 25 https://doi.org/10.1063/1.1489097	journal	June 2002
Micro-architectured materials: past, present and future Fleck, N. A.; Deshpande, V. S.; Ashby, M. F. Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 466, Issue 2121 https://doi.org/10.1098/rspa.2010.0215	journal	March 2010
3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity Lewis, Brett B.; Winkler, Robert; Sang, Xiahan Beilstein Journal of Nanotechnology, Vol. 8 https://doi.org/10.3762/bjnano.8.83	journal	January 2017
Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H ₂ O Reactions Geier, Barbara; Gspan, Christian; Winkler, Robert The Journal of Physical Chemistry C, Vol. 118, Issue 25 https://doi.org/10.1021/jp503442b	journal	June 2014
A Tunable Strain Sensor Using Nanogranular Metals Schwalb, Christian H.; Grimm, Christina; Baranowski, Markus Sensors, Vol. 10, Issue 11 https://doi.org/10.3390/s101109847	journal	November 2010
Materials become insensitive to flaws at nanoscale: Lessons from nature Gao, H.; Ji, B.; Jager, I. L. Proceedings of the National Academy of Sciences, Vol. 100, Issue 10 https://doi.org/10.1073/pnas.0631609100	journal	May 2003
Comparison of Young's Modulus Dependency on Beam Accelerating Voltage between Electron-Beam- and Focused Ion-Beam-Induced Chemical Vapor Deposition Pillars Okada, Satoshi; Mukawa, Takahito; Kobayashi, Ryota Japanese Journal of Applied Physics, Vol. 45, Issue 6B https://doi.org/10.1143/JJAP.45.5556	journal	June 2006
Scale dependence of mechanical properties of single crystals under uniform deformation Benzerga, A. A.; Shaver, N. F. Scripta Materialia, Vol. 54, Issue 11 https://doi.org/10.1016/j.scriptamat.2006.02.003	journal	June 2006
Direct-Write 3D Nanoprinting of Plasmonic Structures Winkler, Robert; Schmidt, Franz-Philipp; Haselmann, Ulrich ACS Applied Materials & Interfaces, Vol. 9, Issue 9 https://doi.org/10.1021/acsami.6b13062	journal	December 2016
Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor Ding, W.; Dikin, D. A.; Chen, X. Journal of Applied Physics, Vol. 98, Issue 1 https://doi.org/10.1063/1.1940138	journal	July 2005
A mechanically driven form of Kirigami as a route to 3D mesostructures in micro/nanomembranes Zhang, Yihui; Yan, Zheng; Nan, Kewang Proceedings of the National Academy of Sciences, Vol. 112, Issue 38 https://doi.org/10.1073/pnas.1515602112	journal	September 2015
Rapid Prototyping of Site-Specific Nanocontacts by Electron and Ion Beam Assisted Direct-Write Nanolithography Gopal, Vidyut; Radmilovic, Velimir R.; Daraio, Chiara Nano Letters, Vol. 4, Issue 11 https://doi.org/10.1021/nl0492133	journal	November 2004
Fabrication and deformation of three-dimensional hollow ceramic nanostructures Jang, Dongchan; Meza, Lucas R.; Greer, Frank Nature Materials, Vol. 12, Issue 10 https://doi.org/10.1038/nmat3738	journal	September 2013
The use of atomic layer deposition in advanced nanopatterning Mackus, A. J. M.; Bol, A. A.; Kessels, W. M. M. Nanoscale, Vol. 6, Issue 19 https://doi.org/10.1039/C4NR01954G	journal	January 2014
On the elastic moduli of nanocrystalline Fe, Cu, Ni, and Cu–Ni alloys prepared by mechanical milling/alloying Shen, T. D.; Koch, C. C.; Tsui, T. Y. Journal of Materials Research, Vol. 10, Issue 11 https://doi.org/10.1557/JMR.1995.2892	journal	November 1995
Resilient 3D hierarchical architected metamaterials Meza, Lucas R.; Zelhofer, Alex J.; Clarke, Nigel Proceedings of the National Academy of Sciences, Vol. 112, Issue 37 https://doi.org/10.1073/pnas.1509120112	journal	September 2015
Plasmonic gold helices for the visible range fabricated by oxygen plasma purification of electron beam induced deposits Haverkamp, Caspar; Höflich, Katja; Jäckle, Sara Nanotechnology, Vol. 28, Issue 5 https://doi.org/10.1088/1361-6528/28/5/055303	journal	December 2016
Origin of the Difference in the Resistivity of As-Grown Focused-Ion- and Focused-Electron-Beam-Induced Pt Nanodeposits De Teresa, J. M.; Córdoba, R.; Fernández-Pacheco, A. Journal of Nanomaterials, Vol. 2009 https://doi.org/10.1155/2009/936863	journal	January 2009
Ultralight, ultrastiff mechanical metamaterials Zheng, X.; Lee, H.; Weisgraber, T. H. Science, Vol. 344, Issue 6190 https://doi.org/10.1126/science.1252291	journal	June 2014
Growth Manner and Mechanical Characteristics of Amorphous Carbon Nanopillars Grown by Electron-Beam-Induced Chemical Vapor Deposition Okada, Satoshi; Mukawa, Takahito; Kobayashi, Ryota Japanese Journal of Applied Physics, Vol. 44, Issue 7B https://doi.org/10.1143/JJAP.44.5646	journal	July 2005
Fabrication of magnetic nanostructures using electron beam induced chemical vapour deposition Takeguchi, Masaki; Shimojo, Masayuki; Furuya, Kazuo Nanotechnology, Vol. 16, Issue 8 https://doi.org/10.1088/0957-4484/16/8/057	journal	June 2005
Mechanical properties of high-aspect-ratio atomic-force microscope tips Jänchen, G.; Hoffmann, P.; Kriele, A. Applied Physics Letters, Vol. 80, Issue 24 https://doi.org/10.1063/1.1485307	journal	June 2002
Effect of organometallic clamp properties on the apparent diversity of tensile response of nanowires Murphy, Kathryn F.; Chen, Lisa Y.; Gianola, Daniel S. Nanotechnology, Vol. 24, Issue 23 https://doi.org/10.1088/0957-4484/24/23/235704	journal	May 2013
Design and Fabrication of Hollow Rigid Nanolattices via Two-Photon Lithography: Design and Fabrication of Hollow Rigid Nanolattices Montemayor, Lauren C.; Meza, Lucas R.; Greer, Julia R. Advanced Engineering Materials, Vol. 16, Issue 2 https://doi.org/10.1002/adem.201300254	journal	October 2013
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments Oliver, W. C.; Pharr, G. M. Journal of Materials Research, Vol. 7, Issue 06, p. 1564-1583 https://doi.org/10.1557/JMR.1992.1564	journal	June 1992
Electron-beam-based photomask repair Edinger, Klaus; Becht, Hans; Bihr, Johannes Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 6 https://doi.org/10.1116/1.1808711	journal	January 2004
Fabrication and characterization of micromechanical bridges with strain sensors deposited using focused electron beam induced technology Moczała, M.; Kwoka, K.; Piasecki, T. Microelectronic Engineering, Vol. 176 https://doi.org/10.1016/j.mee.2017.03.009	journal	May 2017
Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology Oliver, W. C.; Pharr, G. M. Journal of Materials Research, Vol. 19, Issue 1 https://doi.org/10.1557/jmr.2004.19.1.3	journal	January 2004
Maskless and Resist-Free Rapid Prototyping of Three-Dimensional Structures Through Electron Beam Induced Deposition (EBID) of Carbon in Combination with Metal-Assisted Chemical Etching (MaCE) of Silicon Rykaczewski, Konrad; Hildreth, Owen J.; Kulkarni, Dhaval ACS Applied Materials & Interfaces, Vol. 2, Issue 4 https://doi.org/10.1021/am1000773	journal	March 2010
Size dependence of mechanical properties of gold at the sub-micron scale Greer, J. R.; Nix, W. D. Applied Physics A, Vol. 80, Issue 8 https://doi.org/10.1007/s00339-005-3204-6	journal	March 2005
Three dimensional magnetic nanowires grown by focused electron-beam induced deposition Fernández-Pacheco, Amalio; Serrano-Ramón, Luis; Michalik, Jan M. Scientific Reports, Vol. 3, Issue 1 https://doi.org/10.1038/srep01492	journal	March 2013
The Direct Writing of Plasmonic Gold Nanostructures by Electron-Beam-Induced Deposition Höflich, Katja; Yang, Ren Bin; Berger, Andreas Advanced Materials, Vol. 23, Issue 22-23 https://doi.org/10.1002/adma.201004114	journal	April 2011
Further analysis of the size effect in indentation hardness tests of some metals Atkinson, M. Journal of Materials Research, Vol. 10, Issue 11 https://doi.org/10.1557/JMR.1995.2908	journal	November 1995
Tuning shape, composition and magnetization of 3D cobalt nanowires grown by focused electron beam induced deposition (FEBID) Pablo-Navarro, Javier; Sanz-Hernández, Dédalo; Magén, César Journal of Physics D: Applied Physics, Vol. 50, Issue 18 https://doi.org/10.1088/1361-6463/aa63b4	journal	April 2017
Mechanical properties of ultrahigh-strength gold nanowires Wu, Bin; Heidelberg, Andreas; Boland, John J. Nature Materials, Vol. 4, Issue 7 https://doi.org/10.1038/nmat1403	journal	June 2005
Platinum composite nanowires for ultrasensitive mass detection Hao, Tingting; Shen, Tiehan H.; Li, Wuxia Applied Physics Letters, Vol. 110, Issue 14 https://doi.org/10.1063/1.4979645	journal	April 2017
Atomic Layer Deposition: An Overview George, Steven M. Chemical Reviews, Vol. 110, Issue 1, p. 111-131 https://doi.org/10.1021/cr900056b	journal	January 2010
Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition Fowlkes, Jason D.; Winkler, Robert; Lewis, Brett B. ACS Nano, Vol. 10, Issue 6 https://doi.org/10.1021/acsnano.6b02108	journal	May 2016
Fabrication, dynamics, and electrical properties of insulated scanning probe microscopy probes for electrical and electromechanical imaging in liquids Rodriguez, B. J.; Jesse, S.; Seal, K. Applied Physics Letters, Vol. 91, Issue 9 https://doi.org/10.1063/1.2778762	journal	August 2007
Mechanical properties and the hierarchical structure of bone Rho, Jae-Young; Kuhn-Spearing, Liisa; Zioupos, Peter Medical Engineering & Physics, Vol. 20, Issue 2 https://doi.org/10.1016/S1350-4533(98)00007-1	journal	March 1998
Dose and energy dependence of mechanical properties of focused electron-beam-induced pillar deposits from Cu(C ₅ HF ₆ O ₂ ) ₂ Friedli, V.; Utke, I.; Mølhave, K. Nanotechnology, Vol. 20, Issue 38 https://doi.org/10.1088/0957-4484/20/38/385304	journal	August 2009
A microbend test method for measuring the plasticity length scale Stölken, J. S.; Evans, A. G. Acta Materialia, Vol. 46, Issue 14 https://doi.org/10.1016/S1359-6454(98)00153-0	journal	September 1998
Effects of the substrate on the determination of thin film mechanical properties by nanoindentation Saha, Ranjana; Nix, William D. Acta Materialia, Vol. 50, Issue 1 https://doi.org/10.1016/S1359-6454(01)00328-7	journal	January 2002
Approaching theoretical strength in glassy carbon nanolattices Bauer, J.; Schroer, A.; Schwaiger, R. Nature Materials, Vol. 15, Issue 4 https://doi.org/10.1038/nmat4561	journal	February 2016
Measuring True Young's Modulus of a Cantilevered Nanowire: Effect of Clamping on Resonance Frequency Qin, Qingquan; Xu, Feng; Cao, Yongqing Small, Vol. 8, Issue 16 https://doi.org/10.1002/smll.201200314	journal	May 2012
Nanoscale 3D Chiral Plasmonic Helices with Circular Dichroism at Visible Frequencies Esposito, Marco; Tasco, Vittorianna; Cuscunà, Massimo ACS Photonics, Vol. 2, Issue 1 https://doi.org/10.1021/ph500318p	journal	December 2014
Plasmonic Gold Helices for the visible range fabricated by oxygen plasma purification of electron beam induced deposits Haverkamp, Caspar; Höflich, Katja; Jäckle, Sara arXiv https://doi.org/10.48550/arxiv.1606.07302	text	January 2016

Cited By (5)

Tunable 3D Nanoresonators for Gas‐Sensing Applications Arnold, Georg; Winkler, Robert; Stermitz, Martin Advanced Functional Materials, Vol. 28, Issue 19 https://doi.org/10.1002/adfm.201707387	journal	March 2018
Thermal Transport in 3D Nanostructures Zhan, Haifei; Nie, Yihan; Chen, Yongnan Advanced Functional Materials, Vol. 30, Issue 8 https://doi.org/10.1002/adfm.201903841	journal	August 2019
3D nanoprinting via focused electron beams Winkler, R.; Fowlkes, J. D.; Rack, P. D. Journal of Applied Physics, Vol. 125, Issue 21 https://doi.org/10.1063/1.5092372	journal	June 2019
Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review Plank, Harald; Winkler, Robert; Schwalb, Christian H. Micromachines, Vol. 11, Issue 1 https://doi.org/10.3390/mi11010048	journal	December 2019
Analyzing Nanogranularity of Focused Electron-Beam-Induced Deposited (FEBID) Materials by Electron Tomography Trummer, Cornelia; Winkler, Robert; Plank, Harald arXiv https://doi.org/10.48550/arxiv.2101.02896	text	January 2021

Similar Records

Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition

Journal Article · Fri May 22 00:00:00 EDT 2020 · Micromachines · OSTI ID:1440834

Belianinov, Alex; Burch, Matthew J.; Ievlev, Anton; +7 more

Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition

Journal Article · Fri Jun 10 00:00:00 EDT 2016 · ACS Nano · OSTI ID:1440834

Fowlkes, Jason D.; Winkler, Robert; Lewis, Brett B.; +3 more

Nanomechanical properties of platinum thin films synthesized by atomic layer deposition

Journal Article · Sun Mar 01 00:00:00 EST 2015 · Surface and Coatings Technology · OSTI ID:1440834

Mamun, M.A.; Gu, D.; Baumgart, H.; +1 more

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY

Title: Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition

Citation Formats

References (48)

Cited By (5)

Similar Records

Related Subjects