Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: excitation dynamics and ion flux asymmetry

Bruneau, B.; Diomede, P.; Economou, D. J.; Longo, S.; Gans, T.; O'Connell, D.; Greb, A.; Johnson, E.; Booth, J-P

doi:10.1088/0963-0252/25/4/045019

Title: Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: excitation dynamics and ion flux asymmetry

Journal Article · Wed Jun 08 00:00:00 EDT 2016 · Plasma Sources Science and Technology

DOI:https://doi.org/10.1088/0963-0252/25/4/045019· OSTI ID:1434929

Bruneau, B. ^[1]; Diomede, P. ^[2]; Economou, D. J. ^[3]; Longo, S. ^[4]; Gans, T. ^[5]; O'Connell, D. ^[5]; Greb, A. ^[5]; Johnson, E. ^[1]; Booth, J-P ^[6]

Ecole Polytechnique, Palaiseau (France). LPICM-CNRS
Univ. of Houston, Houston, TX (United States). Plasma Processing Lab., Dept. of Chemical & Biomolecular Engineering; Dutch Inst. for Fundamental Energy Research (DIFFER). FOM Inst.
Univ. of Houston, Houston, TX (United States). Plasma Processing Lab., Dept. of Chemical & Biomolecular Engineering
Univ. degli Studi di Bari (Italy). Dipt. di Chimica
Univ. of York (United Kingdom). York Plasma Inst., Dept. of Physics
Ecole Polytechnique, Palaiseau (France); Univ. Paris-Sud, Palaiseau (France)

Parallel plate capacitively coupled plasmas in hydrogen at relatively high pressure (~1 Torr) are excited with tailored voltage waveforms containing up to five frequencies. Predictions of a hybrid model combining a particle-in-cell simulation with Monte Carlo collisions and a fluid model are compared to phase resolved optical emission spectroscopy measurements, yielding information on the dynamics of the excitation rate in these discharges. When the discharge is excited with amplitude asymmetric waveforms, the discharge becomes electrically asymmetric, with different ion energies at each of the two electrodes. Unexpectedly, large differences in the $$\text{H}_{2}^{+}$$ fluxes to each of the two electrodes are caused by the different $$\text{H}_{3}^{+}$$ energies. When the discharge is excited with slope asymmetric waveforms, only weak electrical asymmetry of the discharge is observed. In this case, electron power absorption due to fast sheath expansion at one electrode is balanced by electron power absorption at the opposite electrode due to a strong electric field reversal.

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Research Organization:: Univ. of Michigan, Ann Arbor, MI (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES)

Grant/Contract Number:: SC0001939

OSTI ID:: 1434929

Journal Information:: Plasma Sources Science and Technology, Vol. 25, Issue 4; ISSN 0963-0252

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 10 works

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