Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4

Bruneau, Bastien; Lafleur, T.; Gans, T.; 'Connell, D.O.; Greb, A.; Korolov, I.; Derzsi, A.; Donko, Z.; Brandt, S.; Schungel, E.

doi:10.1088/0963-0252/25/1/01LT02

Title: Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H₂ and CF₄

Journal Article · Tue Dec 01 00:00:00 EST 2015 · Plasma Sources Science and Technology

DOI:https://doi.org/10.1088/0963-0252/25/1/01LT02· OSTI ID:1434931

Bruneau, Bastien ^[1]; Lafleur, T. ^[1]; Gans, T. ^[2]; 'Connell, D.O. ^[2]; Greb, A. ^[2]; Korolov, I. ^[3]; Derzsi, A. ^[3]; Donko, Z. ^[3]; Brandt, S. ^[4]; Schungel, E. ^[4]

Ecole Polytechnique, Palaiseau (France)
Univ. of York (United Kingdom). York Plasma Inst., Dept. of Physics
Hungarian Academy of Sciences, Budapest (Hungary). Inst. for Solid State Physics and Optics, Wigner Research Centre for Physics
West Virginia Univ., Morgantown, WV (United States). Dept. of Physics

Tailored voltage excitation waveforms provide an efficient control of the ion energy (through the electrical asymmetry effect) in capacitive plasmas by varying the 'amplitude' asymmetry of the waveform. In this work, the effect of a 'slope' asymmetry of the waveform is investigated by using sawtooth-like waveforms, through which the sheath dynamic can be manipulated. A remarkably different discharge dynamic is found for Ar, H₂, and CF₄ gases, which is explained by the different dominant electron heating mechanisms and plasma chemistries. In comparison to Argon we find that the electrical asymmetry can even be reversed by using an electronegative gas such as CF₄. Phase resolved optical emission spectroscopy measurements, probing the spatiotemporal distribution of the excitation rate show excellent agreement with the results of particle-in-cell simulations, confirming the high degree of correlation between the excitation rates with the dominant heating mechanisms in the various gases. It is shown that, depending on the gas used, sawtooth-like voltage waveforms may cause a strong asymmetry.

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Research Organization:: Univ. of Michigan, Ann Arbor, MI (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES)

Grant/Contract Number:: SC0001939

OSTI ID:: 1434931

Journal Information:: Plasma Sources Science and Technology, Vol. 25, Issue 1; ISSN 0963-0252

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 29 works

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Experimental and computational investigations of the effect of the electrode gap on capacitively coupled radio frequency oxygen discharges You, K. H.; Schulze, J.; Derzsi, A. Physics of Plasmas, Vol. 26, Issue 1 https://doi.org/10.1063/1.5063543	journal	January 2019

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Title: Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4

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Title: Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H₂ and CF₄