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Title: Semiconductor Manufacturing Modeling Final Report CRADA No. TC-1069-94

Technical Report ·
DOI:https://doi.org/10.2172/1426099· OSTI ID:1426099
 [1];  [2]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. Semiconductor Research Corp., Durham, NC (United States)

The program is divided into four (4) project areas: Bulk processing, interconnects, etch, and ab initio computations.

Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC52-07NA27344
OSTI ID:
1426099
Report Number(s):
LLNL-TR-747341; UCRL-ID-138157
Country of Publication:
United States
Language:
English