Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes

Sharma, Kashish; Routkevitch, Dmitri; Varaksa, Natalia; George, Steven M.

doi:10.1116/1.4937728

Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes

Journal Article · Thu Dec 24 00:00:00 EST 2015 · Journal of Vacuum Science and Technology A

DOI:https://doi.org/10.1116/1.4937728· OSTI ID:1421141

Sharma, Kashish ^[1]; Routkevitch, Dmitri ^[2]; Varaksa, Natalia ^[2]; George, Steven M. ^[3]

Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309
InRedox, Longmont, Colorado 80544
Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309 and Department of Mechanical Engineering, University of Colorado, Boulder, Colorado 80309

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View Accepted Manuscript (Publisher)

Sponsoring Organization:: USDOE

OSTI ID:: 1421141

Alternate ID(s):: OSTI ID: 22489778

Journal Information:: Journal of Vacuum Science and Technology A, Journal Name: Journal of Vacuum Science and Technology A Journal Issue: 1 Vol. 34; ISSN 0734-2101; ISSN JVTAD6

Publisher:: American Vacuum SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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