A review of micromirror arrays

Song, Yuanping; Panas, Robert M.; Hopkins, Jonathan B.

doi:10.1016/j.precisioneng.2017.08.012

A review of micromirror arrays

Journal Article · Wed Aug 30 00:00:00 EDT 2017 · Precision Engineering

DOI:https://doi.org/10.1016/j.precisioneng.2017.08.012· OSTI ID:1418903

Song, Yuanping ^[1]; Panas, Robert M. ^[2]; Hopkins, Jonathan B. ^[1]

Univ. of California, Los Angeles, CA (United States). Mechanical and Aerospace Engineering
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States). Materials Engineering Division

The aim of this article is to provide a review of micromirror array (MMA) technologies (2631 MMA research papers and patents were reviewed for this effort). The performance capabilities of 277 MMA designs from 49 companies and 23 academic research groups are categorized and compared. The designs are categorized according to (i) their array’s dimension (e.g., 2D arrays consisting of mirrors that cover a surface, 1D arrays consisting of mirrors in a row, and 0D arrays consisting of only a single mirror), (ii) the nature of the surface of their mirrors (e.g., continuous or discrete), (iii) what combination of tip, tilt, and/or piston degrees of freedom (DOFs) they achieve, and (iv) how they are actuated. Standardized performance metrics that can be systematically applied to every MMA design (e.g., mirror area, fill factor, pitch, range of motion, maximum acceleration, actuator energy density, and number of uncontrolled DOFs) are defined and plotted for existing designs to enable their fair comparison. Theoretical bounds on what is physically possible for MMAs to achieve are also derived and depicted in these plots to highlight the amount of performance improvement that remains to be achieved by future designs and guidelines are provided to aid in the development of these future designs.

View Accepted Manuscript (DOE)

Research Organization:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC52-07NA27344

OSTI ID:: 1418903

Alternate ID(s):: OSTI ID: 1495617

Report Number(s):: LLNL-JRNL--729264

Journal Information:: Precision Engineering, Journal Name: Precision Engineering Journal Issue: C Vol. 51; ISSN 0141-6359

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors Gu-Stoppel, S.; Janes, J.; Quenzer, H. J. SPIE MOEMS-MEMS, SPIE Proceedings https://doi.org/10.1117/12.2036565	conference	March 2014
Modeling and simulations of new electrostatically driven, bimorph actuator for high beam steering micromirror deflection angles Walton, John P.; Coutu, Ronald A.; Starman, LaVern SPIE OPTO, SPIE Proceedings https://doi.org/10.1117/12.2079390	conference	February 2015
16-k infrared micromirror arrays with large-beam deflection and .10-mm pixel size Reimer, Klaus; Engelke, R.; Witt, Martin Symposium on Micromachining and Microfabrication, SPIE Proceedings https://doi.org/10.1117/12.361270	conference	September 1999
Active-matrix-addressed micromirror array for wavefront correction in adaptive optics Gehner, Andreas; Doleschal, Wolfgang; Elgner, Andreas Micromachining and Microfabrication, SPIE Proceedings https://doi.org/10.1117/12.443095	conference	October 2001
Investigation into the response of a micro-electro-mechanical compound pivot mirror using finite element modeling Gass, Fawn R.; Dohner, Jeffrey L.; Blum Spahn, Olga Integrated Optoelectronics Devices, SPIE Proceedings https://doi.org/10.1117/12.473200	conference	July 2003
MOEMS spatial light modulator development at the Center for Adaptive Optics Krulevitch, Peter A.; Bierden, Paul A.; Bifano, Thomas Micromachining and Microfabrication, SPIE Proceedings https://doi.org/10.1117/12.478562	conference	January 2003
Emerging digital micromirror device (DMD) applications Dudley, Dana; Duncan, Walter M.; Slaughter, John Micromachining and Microfabrication, SPIE Proceedings https://doi.org/10.1117/12.480761	conference	January 2003
Enabling high-data-rate imaging applications with Grating Light Valve technology Payne, Alexander; DeGroot, Wilhelmus; Monteverde, Robert Micromachining and Microfabrication, SPIE Proceedings https://doi.org/10.1117/12.525886	conference	January 2004
Computer-to-plate printing using the Grating Light Valve device Tamaki, Eiichi; Hashimoto, Yoshimi; Leung, Omar S. Micromachining and Microfabrication, SPIE Proceedings https://doi.org/10.1117/12.525895	conference	January 2004
Overview and applications of Grating-Light-Valve-based optical write engines for high-speed digital imaging Trisnadi, Jahja I.; Carlisle, Clinton B.; Monteverde, Robert Micromachining and Microfabrication, SPIE Proceedings https://doi.org/10.1117/12.525898	conference	January 2004
Static and dynamic micro deformable mirror characterization by phase-shifting and time-averaged interferometry Liotard, Arnaud; Zamkotsian, Frederic SPIE Astronomical Telescopes + Instrumentation, SPIE Proceedings https://doi.org/10.1117/12.550326	conference	September 2004
Tests on micromirror arrays for adaptive optics Liesener, Jan; Hupfer, Werner J.; Gehner, Andreas Optical Science and Technology, the SPIE 49th Annual Meeting, SPIE Proceedings https://doi.org/10.1117/12.558679	conference	October 2004
Modular MEMS design and fabrication for an 80 x 80 transparent optical cross-connect switch Fernandez, Andres; Staker, Bryan P.; Owens, Windsor E. Optics East, SPIE Proceedings https://doi.org/10.1117/12.581901	conference	October 2004
A novel 24-kHz resonant scanner for high-resolution laser display Kurth, Steffen; Kaufmann, Christian; Hahn, Ramon MOEMS-MEMS Micro & Nanofabrication, SPIE Proceedings https://doi.org/10.1117/12.590847	conference	January 2005
Poly-SiGe MEMS actuators for adaptive optics Lin, Blake C.; King, Tsu-Jae; Muller, Richard S. MOEMS-MEMS 2006 Micro and Nanofabrication, SPIE Proceedings https://doi.org/10.1117/12.652247	conference	January 2006
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High-performance silicon scanning mirror for laser printing Davis, Wyatt O.; Brown, Dean; Helsel, Mark MOEMS-MEMS 2007 Micro and Nanofabrication, SPIE Proceedings https://doi.org/10.1117/12.700849	conference	January 2007
Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates Schmidt, Jan-Uwe; Friedrichs, Martin; Bakke, Thor Photonics Europe, SPIE Proceedings https://doi.org/10.1117/12.787015	conference	May 2008
Scaling of the Iris AO segmented MEMS DM to larger arrays Helmbrecht, Michael A.; He, Min; Kempf, Carl J. SPIE MOEMS-MEMS: Micro- and Nanofabrication, SPIE Proceedings https://doi.org/10.1117/12.813824	conference	February 2009
Retro-reflective communications over a kilometre range using a MEMS-based optical tag Scott, Andrew M.; Ridley, Kevin D.; Jones, David C. SPIE Europe Security + Defence, SPIE Proceedings https://doi.org/10.1117/12.835073	conference	September 2009
High aspect ratio micromirror array with two degrees of freedom for femtosecond pulse shaping Weber, Stefan M.; Noell, Wilfried; Lani, Sébastien MOEMS-MEMS, SPIE Proceedings https://doi.org/10.1117/12.840847	conference	February 2010
Synchronized microscanner array for large aperture receiver optics of LIDAR systems Sandner, Thilo; Grasshoff, Thomas; Wildenhain, Michael MOEMS-MEMS, SPIE Proceedings https://doi.org/10.1117/12.844923	conference	February 2010
Large aperture MEMS scanner module for 3D distance measurement Sandner, Thilo; Wildenhain, Michael; Gerwig, Christian MOEMS-MEMS, SPIE Proceedings https://doi.org/10.1117/12.844926	conference	February 2010
Technology development of diffractive micromirror arrays for the deep ultraviolet to the near infrared spectral range Schmidt, J. -U.; Bring, M.; Heber, J. SPIE Photonics Europe, SPIE Proceedings https://doi.org/10.1117/12.855750	conference	May 2010
Novel Packaging Technology for Microelectromechanical-System Devices Urano, Masami; Sakata, Tomomi; Shimamura, Toshishige Japanese Journal of Applied Physics, Vol. 44, Issue 11 https://doi.org/10.1143/JJAP.44.8177	journal	November 2005
Versatile micromirror with a multimovement mode Yu, Hongbin; Chen, Haiqing; Fu, Sai Applied Optics, Vol. 44, Issue 7 https://doi.org/10.1364/AO.44.001178	journal	January 2005
Obscura telescope with a MEMS micromirror array for space observation of transient luminous phenomena or fast-moving objects Park, J. H.; Garipov, G. K.; Jeon, J. A. Optics Express, Vol. 16, Issue 25 https://doi.org/10.1364/OE.16.020249	journal	January 2008
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Holographic optical assembly and photopolymerized joining of planar microspheres Shaw, L. A.; Chizari, S.; Panas, R. M. Optics Letters, Vol. 41, Issue 15 https://doi.org/10.1364/OL.41.003571	journal	January 2016
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