Improved Performance of Zinc Oxide Thin Film Transistor Pressure Sensors and a Demonstration of a Commercial Chip Compatibility with the New Force Sensing Technology

Vishniakou, Siarhei; Chen, Renjie; Ro, Yun Goo; Brennan, Christopher J.; Levy, Cooper; Yu, Edward T.; Dayeh, Shadi A.

doi:10.1002/admt.201700279

Improved Performance of Zinc Oxide Thin Film Transistor Pressure Sensors and a Demonstration of a Commercial Chip Compatibility with the New Force Sensing Technology

Journal Article · Mon Jan 22 00:00:00 EST 2018 · Advanced Materials Technologies

DOI:https://doi.org/10.1002/admt.201700279· OSTI ID:1417703

Vishniakou, Siarhei ^[1]; Chen, Renjie ^[1]; Ro, Yun Goo ^[1]; Brennan, Christopher J. ^[2]; Levy, Cooper ^[1]; Yu, Edward T. ^[2]; ^[3]

Integrated Electronics and Biointerfaces Laboratory Department of Electrical and Computer Engineering University of California San Diego La Jolla CA 92093 USA
Microelectronics Research Center The University of Texas at Austin Department of Electrical and Computer Engineering The University of Texas at Austin 10100 Burnet Road Building 160 Austin TX 78758 USA
Integrated Electronics and Biointerfaces Laboratory Department of Electrical and Computer Engineering University of California San Diego La Jolla CA 92093 USA, Materials Science and Engineering Program University of California San Diego La Jolla CA 92093 USA, Department of NanoEngineering University of California San Diego La Jolla CA 92093 USA

Abstract

A zinc oxide thin film transistor is developed and optimized that simultaneously functions as a transistor and a force sensor, thus allowing for scalable integration of sensors into arrays without the need for additional addressing elements. Through systematic material deposition, microscopy, and piezoelectric characterization, it is determined that an O ₂ rich deposition condition improves the transistor performance and pressure sensing characteristics. With these optimizations, a sensitivity of 4 nA kPa ⁻¹ and a latency of below 1 ms are achieved, exceeding the criteria for successful commercialization of arrayed pressure sensors. The functionality of 16 × 16 pressure sensor arrays on thin bendable glass substrates for integrated low weight and flexible touchscreen displays is fabricated and demonstrated and read‐out electronics to interface with the arrays and to record their response in real‐time are developed. Finally, the application of these sensors for mobile displays via their operation with an existing commercial touch integrated circuit controller is demonstrated.

View Accepted Manuscript (Publisher)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC04-94AL85000; AC52-06NA25396

OSTI ID:: 1417703

Journal Information:: Advanced Materials Technologies, Journal Name: Advanced Materials Technologies Journal Issue: 3 Vol. 3; ISSN 2365-709X

Publisher:: Wiley Blackwell (John Wiley & Sons)Copyright Statement

Country of Publication:: United States

Language:: English

References (20)

An in-cell capacitive touch sensor integrated in an LTPS WSVGA TFT-LCD: In-cell capacitive touch sensor Tomita, Satoru; Okada, Takashi; Takahashi, Hideyuki Journal of the Society for Information Display, Vol. 20, Issue 8 https://doi.org/10.1002/jsid.103	journal	August 2012
18.3: An 8.67-in. Foldable OLED Display with an In-cell Touch Sensor Watanabe, Kazunori; Iwaki, Yuji; Uchida, Yutaka SID Symposium Digest of Technical Papers, Vol. 46, Issue 1 https://doi.org/10.1002/sdtp.10451	journal	June 2015
Out-of-Plane Electromechanical Response of Monolayer Molybdenum Disulfide Measured by Piezoresponse Force Microscopy Brennan, Christopher J.; Ghosh, Rudresh; Koul, Kalhan Nano Letters, Vol. 17, Issue 9 https://doi.org/10.1021/acs.nanolett.7b02123	journal	August 2017
Flexible Piezotronic Strain Sensor Zhou, Jun; Gu, Yudong; Fei, Peng Nano Letters, Vol. 8, Issue 9, p. 3035-3040 https://doi.org/10.1021/nl802367t	journal	September 2008
Anomalous piezoelectricity in two-dimensional graphene nitride nanosheets Zelisko, Matthew; Hanlumyuang, Yuranan; Yang, Shubin Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms5284	journal	June 2014
Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers Mannsfeld, Stefan C. B.; Tee, Benjamin C-K.; Stoltenberg, Randall M. Nature Materials, Vol. 9, Issue 10, p. 859-864 https://doi.org/10.1038/nmat2834	journal	September 2010
Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes Lipomi, Darren J.; Vosgueritchian, Michael; Tee, Benjamin C-K. Nature Nanotechnology, Vol. 6, Issue 12, p. 788-792 https://doi.org/10.1038/nnano.2011.184	journal	October 2011
High-resolution electroluminescent imaging of pressure distribution using a piezoelectric nanowire LED array Pan, Caofeng; Dong, Lin; Zhu, Guang Nature Photonics, Vol. 7, Issue 9 https://doi.org/10.1038/nphoton.2013.191	journal	August 2013
Tactile Feedback Display with Spatial and Temporal Resolutions Vishniakou, Siarhei; Lewis, Brian W.; Niu, Xiaofan Scientific Reports, Vol. 3, Issue 1 https://doi.org/10.1038/srep02521	journal	August 2013
Zinc oxide nanorod field effect transistor for long-time cellular force measurement Zong, Xianli; Zhu, Rong Scientific Reports, Vol. 7, Issue 1 https://doi.org/10.1038/srep43661	journal	March 2017
Force sensing microcantilever using sputtered zinc oxide thin film Itoh, T.; Suga, T. Applied Physics Letters, Vol. 64, Issue 1 https://doi.org/10.1063/1.110913	journal	January 1994
Fundamentals of zinc oxide as a semiconductor Janotti, Anderson; Van de Walle, Chris G. Reports on Progress in Physics, Vol. 72, Issue 12 https://doi.org/10.1088/0034-4885/72/12/126501	journal	October 2009
Zinc oxide nanostructures: growth, properties and applications Wang, Zhong Lin Journal of Physics: Condensed Matter, Vol. 16, Issue 25 https://doi.org/10.1088/0953-8984/16/25/R01	journal	June 2004
Ab initio study of piezoelectricity and spontaneous polarization in ZnO Dal Corso, Andrea; Posternak, Michel; Resta, Raffaele Physical Review B, Vol. 50, Issue 15 https://doi.org/10.1103/PhysRevB.50.10715	journal	October 1994
High-definition in-cell touch panel with parallel scanning method Tada, Kenshi; Kida, Kazutoshi; Yamagishi, Shinji 2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) https://doi.org/10.1109/AM-FPD.2016.7543686	conference	July 2016
Subthreshold Schottky-barrier thin-film transistors with ultralow power and high intrinsic gain Lee, Sungsik; Nathan, Arokia Science, Vol. 354, Issue 6310 https://doi.org/10.1126/science.aah5035	journal	October 2016
How fast is fast enough?: a study of the effects of latency in direct-touch pointing tasks Jota, Ricardo; Ng, Albert; Dietz, Paul Proceedings of the SIGCHI Conference on Human Factors in Computing Systems - CHI '13 https://doi.org/10.1145/2470654.2481317	conference	January 2013
Quantitative Calculation of Oxygen Incorporation in Sputtered IGZO Films and the Impact on Transistor Properties Kwon, Seyeoul; Noh, Joo Hyon; Noh, Jiyong Journal of The Electrochemical Society, Vol. 158, Issue 3 https://doi.org/10.1149/1.3530779	journal	January 2011
High-Performance Piezoresistive MEMS Strain Sensor with Low Thermal Sensitivity Mohammed, Ahmed; Moussa, Walied; Lou, Edmond Sensors, Vol. 11, Issue 2 https://doi.org/10.3390/s110201819	journal	January 2011
Development of a Carbon Nanotube-Based Touchscreen Capable of Multi-Touch and Multi-Force Sensing Kim, Wonhyo; Oh, Haekwan; Kwak, Yeonhwa Sensors, Vol. 15, Issue 11 https://doi.org/10.3390/s151128732	journal	November 2015

Similar Records

Pressure-sensing properties of single-walled carbon nanotubes covered with a corona-poled piezoelectric polymer

Journal Article · Mon Jul 18 00:00:00 EDT 2016 · Applied Physics Letters · OSTI ID:22594476

High‐Performance Zinc Tin Oxide TFTs with Active Layers Deposited by Atomic Layer Deposition

Journal Article · Wed Jun 10 20:00:00 EDT 2020 · Advanced Electronic Materials · OSTI ID:1633122

Improved Performance of Zinc Oxide Thin Film Transistor Pressure Sensors and a Demonstration of a Commercial Chip Compatibility with the New Force Sensing Technology

Citation Formats

References (20)

Similar Records

Related Subjects