Heterogeneous nucleation of pits via step pinning during Si(100) homoepitaxy

Yitamben, Esmeralda; Butera, Robert E.; Swartzentruber, Brian S.; Simonson, Robert J.; Misra, Shashank; Carroll, Malcolm S.; Bussmann, Ezra

doi:10.1088/1367-2630/aa9397

Title: Heterogeneous nucleation of pits via step pinning during Si(100) homoepitaxy

Journal Article · Wed Nov 15 00:00:00 EST 2017 · New Journal of Physics

DOI:https://doi.org/10.1088/1367-2630/aa9397· OSTI ID:1406367

Yitamben, Esmeralda ^[1]; Butera, Robert E. ^[2]; Swartzentruber, Brian S. ^[1]; Simonson, Robert J. ^[1]; Misra, Shashank ^[1]; Carroll, Malcolm S. ^[1]; Bussmann, Ezra ^[1]

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Lab. for Physical Sciences, College Park, MD (United States)

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1406367

Alternate ID(s):: OSTI ID: 1465800

Report Number(s):: SAND-2017-11273J; SAND-2017-6009J; 657902; TRN: US1703263

Journal Information:: New Journal of Physics, Vol. 19, Issue 11; ISSN 1367-2630

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 2 works

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References (58)

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Title: Heterogeneous nucleation of pits via step pinning during Si(100) homoepitaxy

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