Fabrication of a single sub-micron pore spanning a single crystal (100) diamond membrane and impact on particle translocation [Particle translocation through a single crystal diamond pore fabricated by electron beam induced chemical etching]

Webb, Jennifer R.; Martin, Aiden A.; Johnson, Robert P.; Joseph, Maxim B.; Newton, Mark E.; Aharonovich, Igor; Toth, Milos; Macpherson, Julie V.

doi:10.1016/j.carbon.2017.06.055

Title: Fabrication of a single sub-micron pore spanning a single crystal (100) diamond membrane and impact on particle translocation [Particle translocation through a single crystal diamond pore fabricated by electron beam induced chemical etching]

Journal Article · Wed Jun 21 00:00:00 EDT 2017 · Carbon

DOI:https://doi.org/10.1016/j.carbon.2017.06.055· OSTI ID:1404831

Webb, Jennifer R. ^[1]; Martin, Aiden A. ^[2]; Johnson, Robert P. ^[3]; Joseph, Maxim B. ^[4]; Newton, Mark E. ^[4]; Aharonovich, Igor ^[5]; Toth, Milos ^[5];

^[4]

Univ. of Warwick Coventry (United Kingdom)
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States); Univ. of Technology, Sydney, Ultimo (Australia)
Univ. of Warwick, Coventry (United Kingdom); Univ. of Lincoln, Lincoln (United Kingdom)
Univ. of Warwick, Coventry (United Kingdom)
Univ. of Technology, Sydney, Ultimo (Australia)

The fabrication of sub-micron pores in single crystal diamond membranes, which span the entirety of the membrane, is described for the first time, and the translocation properties of polymeric particles through the pore investigated. The pores are produced using a combination of laser micromachining to form the membrane and electron beam induced etching to form the pore. Single crystal diamond as the membrane material, has the advantages of chemical stability and durability, does not hydrate and swell, has outstanding electrical properties that facilitate fast, low noise current-time measurements and is optically transparent for combined optical-conductance sensing. The resulting pores are characterized individually using both conductance measurements, employing a microcapillary electrochemical setup, and electron microscopy. Proof-of-concept experiments to sense charged polystyrene particles as they are electrophoretically driven through a single diamond pore are performed, and the impact of this new pore material on particle translocation is explored. As a result, these findings reveal the potential of diamond as a platform for pore-based sensing technologies and pave the way for the fabrication of single nanopores which span the entirety of a diamond membrane.

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Research Organization:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC52-07NA27344

OSTI ID:: 1404831

Alternate ID(s):: OSTI ID: 1562995

Report Number(s):: LLNL-JRNL-680087

Journal Information:: Carbon, Vol. 122, Issue C; ISSN 0008-6223

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 7 works

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Title: Fabrication of a single sub-micron pore spanning a single crystal (100) diamond membrane and impact on particle translocation [Particle translocation through a single crystal diamond pore fabricated by electron beam induced chemical etching]

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