All‐Dielectric Heterogeneous Metasurface as an Efficient Ultra‐Broadband Reflector

Yao, Yuhan; Wu, Wei

doi:10.1002/adom.201700090

Title: All‐Dielectric Heterogeneous Metasurface as an Efficient Ultra‐Broadband Reflector

Journal Article · Tue Jun 06 00:00:00 EDT 2017 · Advanced Optical Materials

DOI:https://doi.org/10.1002/adom.201700090· OSTI ID:1401806

Yao, Yuhan ^[1]; Wu, Wei ^[1]

Ming Hsieh Department of Electrical Engineering University of Southern California 3737 Watt Way 90089 USA

Conventional all‐dielectric metasurfaces made from high‐index and low‐loss materials (such as Si or GaAs) can achieve high optical efficiencies as well as broadband characteristics, mostly for the infrared (IR) light. However, maintaining the bandwidth and efficiency for conventional all‐dielectric metasurfaces for visible or near‐IR light becomes challenging, due to the limitations from material selection as well as fabrication techniques. In this paper, the idea of heterogeneous all‐dielectric metasurfaces is proposed for a better metasurface design in shorter‐wavelength ranges. An ultra‐broadband reflector, as a proof‐of‐principle demonstration, is presented in this paper, both numerically and experimentally. The broadband reflector demonstrates a good optical efficiency, a broadband reflectance, as well as a great manufacturability. Nanoimprint lithography patterning process and advanced etching recipes are developed for the large‐area and low‐cost heterogeneous metasurface fabrication.

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Sponsoring Organization:: USDOE

Grant/Contract Number:: DE‐AC02‐05CH11231

OSTI ID:: 1401806

Journal Information:: Advanced Optical Materials, Journal Name: Advanced Optical Materials Vol. 5 Journal Issue: 14; ISSN 2195-1071

Publisher:: Wiley Blackwell (John Wiley & Sons)Copyright Statement

Country of Publication:: Germany

Language:: English

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Cited by: 20 works

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