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Title: X-ray waveguides for high resolution x-ray analysis

Technical Report ·
DOI:https://doi.org/10.2172/13928· OSTI ID:13928

The project goals were to model, synthesize, and characterize thin-film, x-ray waveguide structures to determine whether such nanostructurcs can be fabricated with the precision required for true waveguide operation at x-ray energies. In FY98, we designed, fabricated, and characterized (at the Stanford Synchrotron Radiation Laboratory) optimized. thin-film, x-ray waveguide structures (XWGs) as resonant concentrators of x-rays which may be applied as diffraction-limited, linear x-ray sources. We fabricated nine waveguide structures that were optimized to operate in the cavity modes m = 1,2,3 and tested them at x-ray energies of 6 to 10 keV. The observed performances were compared to the calculations based on the design structures and excellent agreement was demonstrated. This project plan is presented in TABLE 1 that includes all aspects of the development of these unique thin film x-ray optical devices. X-ray waveguide designs were made using a standard x-ray multilayer x-ray optic Fresnel code. Materials were selected on the basis of calculated performance as well as sputter deposition characteristics. Laboratory x-ray reflectivity measurements were made prior to the SSRL experimental run to assess the quality of the samples. Cross-section Transmission Electron Microscopy observations of selected sample were made to enable assessment of the relationship between the design structures and the fabricated structures. The cross-section TEM observations correlated well with the waveguide fabrication parameters supporting the observed agreement between the experimental and calculated grazing incidence reflectivities and fluorescence as functions of both x-ray energy and grazing angle of incidence.

Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE Office of Defense Programs (DP) (US)
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
13928
Report Number(s):
UCRL-ID-135141; YN0100000; 98-ERD-044; YN0100000; 98-ERD-044; TRN: US0110842
Resource Relation:
Other Information: PBD: 28 Jun 1999
Country of Publication:
United States
Language:
English