Reconstruction of evolving nanostructures in ultrathin films with X-ray waveguide fluorescence holography

Jiang, Zhang; Strzalka, Joseph W.; Walko, Donald A.; Wang, Jin

doi:10.1038/s41467-020-16980-5

Title: Reconstruction of evolving nanostructures in ultrathin films with X-ray waveguide fluorescence holography

Journal Article · Wed Jun 24 00:00:00 EDT 2020 · Nature Communications

DOI:https://doi.org/10.1038/s41467-020-16980-5· OSTI ID:1634846

;

; Walko, Donald A.; Wang, Jin

Fluorescence from an excited atom propagates as an outgoing spherical wave until it is scattered by inhomogeneities or other atoms nearby. An anisotropic intensity pattern, known as the fluorescence hologram, is created when this scattered wave interferes with the freely propagating wave. X-ray fluorescence holography focuses on holograms generated from crystals and gives information about their local atomic structures. Likewise, a waveguide can also generate fluorescence holograms as a result of the establishment of X-ray standing waves. We therefrom introduce the concept of X-ray waveguide fluorescence holography, where a nanostructured thin film by itself is an optical waveguide thus turning this holographic technique into an in-situ and time-resolved imaging probe for nanostructures in the film. A model-free reconstruction method was developed based on the dynamical theory. The performance of X-ray waveguide fluorescence holography is experimentally compared to conventional forward scattering techniques for thin films such as reflectivity and grazing-incidence small

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1634846

Alternate ID(s):: OSTI ID: 1647006; OSTI ID: 1656866

Journal Information:: Nature Communications, Journal Name: Nature Communications Vol. 11 Journal Issue: 1; ISSN 2041-1723

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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Cited by: 8 works

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References (40)

Advanced grazing-incidence techniques for modern soft-matter materials analysis Hexemer, Alexander; Müller-Buschbaum, Peter IUCrJ, Vol. 2, Issue 1 https://doi.org/10.1107/S2052252514024178	journal	January 2015
Glancing-incidence and glancing-takeoff x-ray fluorescence analysis of Ni-GaAs interface reactions Tsuji, Kouichi; Wagatsuma, Kazuaki; Oku, Takeo X-Ray Spectrometry, Vol. 29, Issue 2 https://doi.org/10.1002/(SICI)1097-4539(200003/04)29:2<155::AID-XRS403>3.0.CO;2-K	journal	March 2000
Morphologies of discontinuous gold films on amorphous polymer substrates Kunz, Martin S.; Shull, Kenneth R.; Kellock, Andrew J. Journal of Applied Physics, Vol. 72, Issue 9 https://doi.org/10.1063/1.352362	journal	November 1992
Resonance-enhanced x-rays in thin films: a structure probe for membranes and surface layers Wang, J.; Bedzyk, M.; Caffrey, M. Science, Vol. 258, Issue 5083 https://doi.org/10.1126/science.1439784	journal	October 1992
Experimental phase determination of the structure factor from Kossel line profile Faigel, G.; Bortel, G.; Tegze, M. Scientific Reports, Vol. 6, Issue 1 https://doi.org/10.1038/srep22904	journal	March 2016
Enhancement of X-ray fluorescence intensity from an ultra-thin sandwiched layer at grazing-emission angles Tsuji, Kouichi; Takenaka, Hisataka; Wagatsuma, Kazuaki Spectrochimica Acta Part B: Atomic Spectroscopy, Vol. 54, Issue 13 https://doi.org/10.1016/S0584-8547(99)00143-3	journal	December 1999
Model-independent determination of the surface scattering-length-density profile from specular reflectivity data Pedersen, J. S. Journal of Applied Crystallography, Vol. 25, Issue 2 https://doi.org/10.1107/S0021889891010907	journal	April 1992
Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence Soltwisch, Victor; Hönicke, Philipp; Kayser, Yves Nanoscale, Vol. 10, Issue 13 https://doi.org/10.1039/C8NR00328A	journal	January 2018
Laboratory Setup for Scanning-Free Grazing Emission X-ray Fluorescence Baumann, J.; Herzog, C.; Spanier, M. Analytical Chemistry, Vol. 89, Issue 3 https://doi.org/10.1021/acs.analchem.6b04449	journal	January 2017
X-ray standing waves at a reflecting mirror surface Bedzyk, M. J.; Bommarito, G. M.; Schildkraut, J. S. Physical Review Letters, Vol. 62, Issue 12 https://doi.org/10.1103/PhysRevLett.62.1376	journal	March 1989
Depth-Resolved X-ray Absorption Spectroscopy by Means of Grazing Emission X-ray Fluorescence Kayser, Yves; Sá, Jacinto; Szlachetko, Jakub Analytical Chemistry, Vol. 87, Issue 21 https://doi.org/10.1021/acs.analchem.5b03346	journal	July 2015
Surface Studies of Solids by Total Reflection of X-Rays Parratt, L. G. Physical Review, Vol. 95, Issue 2 https://doi.org/10.1103/PhysRev.95.359	journal	July 1954
Combined evaluation of grazing incidence X-ray fluorescence and X-ray reflectivity data for improved profiling of ultra-shallow depth distributions Ingerle, D.; Meirer, F.; Pepponi, G. Spectrochimica Acta Part B: Atomic Spectroscopy, Vol. 99 https://doi.org/10.1016/j.sab.2014.06.019	journal	September 2014
Structural studies of membranes and surface layers up to 1,000 Å thick using X-ray standing waves Wang, Jin; Bedzyk, Michael J.; Penner, Thomas L. Nature, Vol. 354, Issue 6352 https://doi.org/10.1038/354377a0	journal	December 1991
Photon cross sections from 1 keV to 100 MeV for elements Z=1 to Z=100 Storm, Lellery; Israel, Harvey I. Atomic Data and Nuclear Data Tables, Vol. 7, Issue 6 https://doi.org/10.1016/S0092-640X(70)80017-1	journal	June 1970
Removing multiple scattering and twin images from holographic images Barton, J. J. Physical Review Letters, Vol. 67, Issue 22 https://doi.org/10.1103/PhysRevLett.67.3106	journal	November 1991
Scanning-free grazing emission x-ray fluorescence by means of an angular dispersive arrangement with a two-dimensional position-sensitive area detector Kayser, Y.; Szlachetko, J.; Sà, J. Review of Scientific Instruments, Vol. 84, Issue 12 https://doi.org/10.1063/1.4838575	journal	December 2013
Dynamics of Polymer/Metal Nanocomposite Films at Short Times As Studied by X-ray Standing Waves Guico, Rodney S.; Narayanan, Suresh; Wang, Jin Macromolecules, Vol. 37, Issue 22 https://doi.org/10.1021/ma0486593	journal	November 2004
Characterization of ultra-shallow aluminum implants in silicon by grazing incidence and grazing emission X-ray fluorescence spectroscopy Hönicke, P.; Kayser, Y.; Beckhoff, B. Journal of Analytical Atomic Spectrometry, Vol. 27, Issue 9 https://doi.org/10.1039/c2ja10385k	journal	January 2012
Fluorescent X-ray interference from a protein monolayer Sasaki, Y.; Suzuki, Y.; Ishibashi, T. Science, Vol. 263, Issue 5143 https://doi.org/10.1126/science.8272866	journal	January 1994
X-ray and neutron scattering from rough surfaces Sinha, S. K.; Sirota, E. B.; Garoff, S. Physical Review B, Vol. 38, Issue 4 https://doi.org/10.1103/PhysRevB.38.2297	journal	August 1988
X-ray divergent-beam (Kossel) technique: A review Lider, V. V. Crystallography Reports, Vol. 56, Issue 2 https://doi.org/10.1134/S106377451102012X	journal	March 2011
X-ray fluorescence holography: Going beyond the diffraction limit Marchesini, S.; Fadley, C. S. Physical Review B, Vol. 67, Issue 2 https://doi.org/10.1103/PhysRevB.67.024115	journal	January 2003
Perturbation to the resonance modes by gold nanoparticles in a thin-film-based x-ray waveguide Lee, D. R.; Hagman, A.; Li, Xuefa Applied Physics Letters, Vol. 88, Issue 15 https://doi.org/10.1063/1.2191091	journal	April 2006
X-ray standing waves: a molecular yardstick for biological membranes Bedzyk, M.; Bilderback, D.; Bommarito, G. Science, Vol. 241, Issue 4874 https://doi.org/10.1126/science.3175619	journal	September 1988
Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence Kayser, Yves; Hönicke, Philipp; Banaś, Dariusz Journal of Analytical Atomic Spectrometry, Vol. 30, Issue 5 https://doi.org/10.1039/C4JA00461B	journal	January 2015
Multiple-Energy X-Ray Holography: Atomic Images of Hematite (F $e_{2}$ $O_{3}$ ) Gog, T.; Len, P. M.; Materlik, G. Physical Review Letters, Vol. 76, Issue 17 https://doi.org/10.1103/PhysRevLett.76.3132	journal	April 1996
X-ray holography with atomic resolution Tegze, Miklós; Faigel, Gyula Nature, Vol. 380, Issue 6569 https://doi.org/10.1038/380049a0	journal	March 1996
Waveguide-enhanced grazing-incidence small-angle x-ray scattering of buried nanostructures in thin films Jiang, Zhang; Lee, Dong Ryeol; Narayanan, Suresh Physical Review B, Vol. 84, Issue 7 https://doi.org/10.1103/PhysRevB.84.075440	journal	August 2011
Three-dimensional atomic-arrangement reconstruction from an Auger-electron hologram Matsushita, Tomohiro; Guo, Fang Zhun; Matsui, F. Physical Review B, Vol. 75, Issue 8 https://doi.org/10.1103/PhysRevB.75.085419	journal	February 2007
X-Ray Evanescent-Wave Absorption and Emission Becker, R. S.; Golovchenko, J. A.; Patel, J. R. Physical Review Letters, Vol. 50, Issue 3 https://doi.org/10.1103/PhysRevLett.50.153	journal	January 1983
Real-Time Evolution of the Distribution of Nanoparticles in an Ultrathin-Polymer-Film-Based Waveguide Narayanan, Suresh; Lee, Dong Ryeol; Guico, Rodney S. Physical Review Letters, Vol. 94, Issue 14 https://doi.org/10.1103/PhysRevLett.94.145504	journal	April 2005
X-Ray Scattering from Soft-Matter Thin Films Tolan, Metin Springer Tracts in Modern Physics https://doi.org/10.1007/BFb0112834	book	January 1999
Application of spline functions to the correction of resolution errors in small-angle scattering Schelten, J.; Hossfeld, F. Journal of Applied Crystallography, Vol. 4, Issue 3 https://doi.org/10.1107/S0021889871006733	journal	June 1971
X-ray fluorescence induced by standing waves in the grazing-incidence and grazing-exit modes: study of the Mg–Co–Zr system Tu, Yuchun; Yuan, Yanyan; Le Guen, Karine Journal of Synchrotron Radiation, Vol. 22, Issue 6 https://doi.org/10.1107/S1600577515016239	journal	September 2015
Kossel diffraction in perfect crystals: X-ray standing waves in reverse Gog, T.; Bahr, D.; Materlik, G. Physical Review B, Vol. 51, Issue 10 https://doi.org/10.1103/PhysRevB.51.6761	journal	March 1995
The interference theory of ideal paracrystals Hosemann, R.; Bagchi, S. N. Acta Crystallographica, Vol. 5, Issue 5 https://doi.org/10.1107/S0365110X52001702	journal	September 1952
Diffuse-double layer at a membrane-aqueous interface measured with x-ray standing waves Bedzyk, M.; Bommarito, G.; Caffrey, M. Science, Vol. 248, Issue 4951 https://doi.org/10.1126/science.2321026	journal	April 1990
A new approach for three-dimensional atomic-image reconstruction from a single-energy photoelectron hologram Matsushita, T.; Agui, A.; Yoshigoe, A. Europhysics Letters (EPL), Vol. 65, Issue 2 https://doi.org/10.1209/epl/i2003-10074-6	journal	January 2004
Observation of ultralow-level Al impurities on a silicon surface by high-resolution grazing emission x-ray fluorescence excited by synchrotron radiation Kubala-Kukuś, A.; Banaś, D.; Cao, W. Physical Review B, Vol. 80, Issue 11 https://doi.org/10.1103/PhysRevB.80.113305	journal	September 2009